JPS5384169A - Pattern inspecting device - Google Patents

Pattern inspecting device

Info

Publication number
JPS5384169A
JPS5384169A JP15939576A JP15939576A JPS5384169A JP S5384169 A JPS5384169 A JP S5384169A JP 15939576 A JP15939576 A JP 15939576A JP 15939576 A JP15939576 A JP 15939576A JP S5384169 A JPS5384169 A JP S5384169A
Authority
JP
Japan
Prior art keywords
inspecting device
pattern inspecting
pattern
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15939576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627481B2 (enrdf_load_html_response
Inventor
Masahito Nakashima
Katsumi Fujiwara
Yoshiaki Gotou
Yuushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15939576A priority Critical patent/JPS5384169A/ja
Publication of JPS5384169A publication Critical patent/JPS5384169A/ja
Publication of JPS627481B2 publication Critical patent/JPS627481B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP15939576A 1976-12-30 1976-12-30 Pattern inspecting device Granted JPS5384169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15939576A JPS5384169A (en) 1976-12-30 1976-12-30 Pattern inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15939576A JPS5384169A (en) 1976-12-30 1976-12-30 Pattern inspecting device

Publications (2)

Publication Number Publication Date
JPS5384169A true JPS5384169A (en) 1978-07-25
JPS627481B2 JPS627481B2 (enrdf_load_html_response) 1987-02-17

Family

ID=15692835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15939576A Granted JPS5384169A (en) 1976-12-30 1976-12-30 Pattern inspecting device

Country Status (1)

Country Link
JP (1) JPS5384169A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55165657A (en) * 1979-06-11 1980-12-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Multi-chip package
JPS6249585A (ja) * 1985-08-29 1987-03-04 Hitachi Constr Mach Co Ltd 画像入力装置
JPS62119687A (ja) * 1985-11-20 1987-05-30 Hitachi Constr Mach Co Ltd 画像入力装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273486U (enrdf_load_html_response) * 1988-11-21 1990-06-05
JPH0640086U (ja) * 1992-10-23 1994-05-27 タキロン株式会社 防臭溜桝

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973081A (enrdf_load_html_response) * 1972-11-14 1974-07-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973081A (enrdf_load_html_response) * 1972-11-14 1974-07-15

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55165657A (en) * 1979-06-11 1980-12-24 Chiyou Lsi Gijutsu Kenkyu Kumiai Multi-chip package
JPS6249585A (ja) * 1985-08-29 1987-03-04 Hitachi Constr Mach Co Ltd 画像入力装置
JPS62119687A (ja) * 1985-11-20 1987-05-30 Hitachi Constr Mach Co Ltd 画像入力装置

Also Published As

Publication number Publication date
JPS627481B2 (enrdf_load_html_response) 1987-02-17

Similar Documents

Publication Publication Date Title
ZA771734B (en) Position testing device
JPS5319737A (en) Tester
JPS5369689A (en) Inspection apparatus
JPS52113468A (en) Device for inspecting
JPS52137375A (en) Measuring apparatus
JPS52146682A (en) Surface inspecting apparatus
JPS5382496A (en) Measuring apparatus
JPS52113767A (en) Measuring device
JPS5348787A (en) Testing device
JPS5383657A (en) Measuring apparatus
JPS53143974A (en) Inspecting device
JPS5384169A (en) Pattern inspecting device
JPS5337094A (en) Electroochemical measuring apparatus
JPS539984A (en) Inspecting apparatus
JPS5296358A (en) Device for inspecting pattern
JPS5385375A (en) Pattern inspecting device
JPS52131753A (en) Measuring device
JPS52114242A (en) Pattern analyzer
JPS5385374A (en) Pattern inspecting device
JPS52133241A (en) Shape detecting apparatus
JPS5384167A (en) Pattern inspecting device
JPS5384166A (en) Pattern inspecting device
JPS53139993A (en) Xxray inspecting device
JPS5326157A (en) Stereophotographic measuring apparatus
JPS5368159A (en) Measuring device