JPS5382173A - Positioning method - Google Patents

Positioning method

Info

Publication number
JPS5382173A
JPS5382173A JP15868476A JP15868476A JPS5382173A JP S5382173 A JPS5382173 A JP S5382173A JP 15868476 A JP15868476 A JP 15868476A JP 15868476 A JP15868476 A JP 15868476A JP S5382173 A JPS5382173 A JP S5382173A
Authority
JP
Japan
Prior art keywords
positioning method
superimpose
substrate
photo resist
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15868476A
Other languages
English (en)
Other versions
JPS5538049B2 (ja
Inventor
Niwaji Majima
Koji Igarashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15868476A priority Critical patent/JPS5382173A/ja
Publication of JPS5382173A publication Critical patent/JPS5382173A/ja
Publication of JPS5538049B2 publication Critical patent/JPS5538049B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15868476A 1976-12-27 1976-12-27 Positioning method Granted JPS5382173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15868476A JPS5382173A (en) 1976-12-27 1976-12-27 Positioning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15868476A JPS5382173A (en) 1976-12-27 1976-12-27 Positioning method

Publications (2)

Publication Number Publication Date
JPS5382173A true JPS5382173A (en) 1978-07-20
JPS5538049B2 JPS5538049B2 (ja) 1980-10-02

Family

ID=15677090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15868476A Granted JPS5382173A (en) 1976-12-27 1976-12-27 Positioning method

Country Status (1)

Country Link
JP (1) JPS5382173A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224259A (ja) * 1985-03-15 1987-02-02 Rohm Co Ltd 手動による電子部品のマスク位置合せ方法
JPH0430725U (ja) * 1990-07-05 1992-03-12
JP2010147253A (ja) * 2008-12-18 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> 位置合わせ方法、ホトマスクおよびウエハ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224259A (ja) * 1985-03-15 1987-02-02 Rohm Co Ltd 手動による電子部品のマスク位置合せ方法
JPH0516584B2 (ja) * 1985-03-15 1993-03-04 Rohm Kk
JPH0430725U (ja) * 1990-07-05 1992-03-12
JP2010147253A (ja) * 2008-12-18 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> 位置合わせ方法、ホトマスクおよびウエハ

Also Published As

Publication number Publication date
JPS5538049B2 (ja) 1980-10-02

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