Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu LtdfiledCriticalFujitsu Ltd
Priority to JP14631376ApriorityCriticalpatent/JPS5370673A/en
Publication of JPS5370673ApublicationCriticalpatent/JPS5370673A/en
PURPOSE: To realize the production process of semiconductor devices which makes possible the formation of field parts of a small width and a small area.
COPYRIGHT: (C)1978,JPO&Japio
JP14631376A1976-12-061976-12-06Production of semiconductor device
PendingJPS5370673A
(en)