JPS5368977A - Plasma etching apparatus - Google Patents
Plasma etching apparatusInfo
- Publication number
- JPS5368977A JPS5368977A JP14509376A JP14509376A JPS5368977A JP S5368977 A JPS5368977 A JP S5368977A JP 14509376 A JP14509376 A JP 14509376A JP 14509376 A JP14509376 A JP 14509376A JP S5368977 A JPS5368977 A JP S5368977A
- Authority
- JP
- Japan
- Prior art keywords
- passage
- plasma etching
- etching apparatus
- closing plates
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14509376A JPS5368977A (en) | 1976-12-01 | 1976-12-01 | Plasma etching apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14509376A JPS5368977A (en) | 1976-12-01 | 1976-12-01 | Plasma etching apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5368977A true JPS5368977A (en) | 1978-06-19 |
JPS5716735B2 JPS5716735B2 (ja) | 1982-04-07 |
Family
ID=15377204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14509376A Granted JPS5368977A (en) | 1976-12-01 | 1976-12-01 | Plasma etching apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5368977A (ja) |
-
1976
- 1976-12-01 JP JP14509376A patent/JPS5368977A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5716735B2 (ja) | 1982-04-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |