JPS5368977A - Plasma etching apparatus - Google Patents

Plasma etching apparatus

Info

Publication number
JPS5368977A
JPS5368977A JP14509376A JP14509376A JPS5368977A JP S5368977 A JPS5368977 A JP S5368977A JP 14509376 A JP14509376 A JP 14509376A JP 14509376 A JP14509376 A JP 14509376A JP S5368977 A JPS5368977 A JP S5368977A
Authority
JP
Japan
Prior art keywords
passage
plasma etching
etching apparatus
closing plates
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14509376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5716735B2 (enExample
Inventor
Kazushi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14509376A priority Critical patent/JPS5368977A/ja
Publication of JPS5368977A publication Critical patent/JPS5368977A/ja
Publication of JPS5716735B2 publication Critical patent/JPS5716735B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP14509376A 1976-12-01 1976-12-01 Plasma etching apparatus Granted JPS5368977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14509376A JPS5368977A (en) 1976-12-01 1976-12-01 Plasma etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14509376A JPS5368977A (en) 1976-12-01 1976-12-01 Plasma etching apparatus

Publications (2)

Publication Number Publication Date
JPS5368977A true JPS5368977A (en) 1978-06-19
JPS5716735B2 JPS5716735B2 (enExample) 1982-04-07

Family

ID=15377204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14509376A Granted JPS5368977A (en) 1976-12-01 1976-12-01 Plasma etching apparatus

Country Status (1)

Country Link
JP (1) JPS5368977A (enExample)

Also Published As

Publication number Publication date
JPS5716735B2 (enExample) 1982-04-07

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