JPS5364463A - Fixing tray of semiconductor wafers - Google Patents

Fixing tray of semiconductor wafers

Info

Publication number
JPS5364463A
JPS5364463A JP13955376A JP13955376A JPS5364463A JP S5364463 A JPS5364463 A JP S5364463A JP 13955376 A JP13955376 A JP 13955376A JP 13955376 A JP13955376 A JP 13955376A JP S5364463 A JPS5364463 A JP S5364463A
Authority
JP
Japan
Prior art keywords
semiconductor wafers
fixing tray
wafer
fixing
polyurethane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13955376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS542537B2 (cs
Inventor
Shojiro Miyake
Masao Nishijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13955376A priority Critical patent/JPS5364463A/ja
Publication of JPS5364463A publication Critical patent/JPS5364463A/ja
Publication of JPS542537B2 publication Critical patent/JPS542537B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP13955376A 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers Granted JPS5364463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13955376A JPS5364463A (en) 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13955376A JPS5364463A (en) 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers

Publications (2)

Publication Number Publication Date
JPS5364463A true JPS5364463A (en) 1978-06-08
JPS542537B2 JPS542537B2 (cs) 1979-02-08

Family

ID=15247933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13955376A Granted JPS5364463A (en) 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS5364463A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120764U (cs) * 1987-01-29 1988-08-04
JPH04180650A (ja) * 1990-11-15 1992-06-26 Nec Kyushu Ltd フルカットダイシング用テープ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6391475U (cs) * 1986-12-04 1988-06-13

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493320A (cs) * 1972-05-02 1974-01-12
JPS5091460U (cs) * 1973-12-24 1975-08-01
JPS50134574A (cs) * 1974-04-01 1975-10-24

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493320A (cs) * 1972-05-02 1974-01-12
JPS5091460U (cs) * 1973-12-24 1975-08-01
JPS50134574A (cs) * 1974-04-01 1975-10-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120764U (cs) * 1987-01-29 1988-08-04
JPH04180650A (ja) * 1990-11-15 1992-06-26 Nec Kyushu Ltd フルカットダイシング用テープ

Also Published As

Publication number Publication date
JPS542537B2 (cs) 1979-02-08

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