JPS63120764U - - Google Patents
Info
- Publication number
- JPS63120764U JPS63120764U JP1987011678U JP1167887U JPS63120764U JP S63120764 U JPS63120764 U JP S63120764U JP 1987011678 U JP1987011678 U JP 1987011678U JP 1167887 U JP1167887 U JP 1167887U JP S63120764 U JPS63120764 U JP S63120764U
- Authority
- JP
- Japan
- Prior art keywords
- fixed
- polishing device
- surface plate
- abrasive object
- fixed abrasive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011678U JPS63120764U (cs) | 1987-01-29 | 1987-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987011678U JPS63120764U (cs) | 1987-01-29 | 1987-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63120764U true JPS63120764U (cs) | 1988-08-04 |
Family
ID=30799109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987011678U Pending JPS63120764U (cs) | 1987-01-29 | 1987-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63120764U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364463A (en) * | 1976-11-22 | 1978-06-08 | Nippon Telegr & Teleph Corp <Ntt> | Fixing tray of semiconductor wafers |
-
1987
- 1987-01-29 JP JP1987011678U patent/JPS63120764U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364463A (en) * | 1976-11-22 | 1978-06-08 | Nippon Telegr & Teleph Corp <Ntt> | Fixing tray of semiconductor wafers |
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