JPS542537B2 - - Google Patents

Info

Publication number
JPS542537B2
JPS542537B2 JP13955376A JP13955376A JPS542537B2 JP S542537 B2 JPS542537 B2 JP S542537B2 JP 13955376 A JP13955376 A JP 13955376A JP 13955376 A JP13955376 A JP 13955376A JP S542537 B2 JPS542537 B2 JP S542537B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13955376A
Other languages
Japanese (ja)
Other versions
JPS5364463A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13955376A priority Critical patent/JPS5364463A/ja
Publication of JPS5364463A publication Critical patent/JPS5364463A/ja
Publication of JPS542537B2 publication Critical patent/JPS542537B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP13955376A 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers Granted JPS5364463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13955376A JPS5364463A (en) 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13955376A JPS5364463A (en) 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers

Publications (2)

Publication Number Publication Date
JPS5364463A JPS5364463A (en) 1978-06-08
JPS542537B2 true JPS542537B2 (cs) 1979-02-08

Family

ID=15247933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13955376A Granted JPS5364463A (en) 1976-11-22 1976-11-22 Fixing tray of semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS5364463A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6391475U (cs) * 1986-12-04 1988-06-13

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63120764U (cs) * 1987-01-29 1988-08-04
JPH04180650A (ja) * 1990-11-15 1992-06-26 Nec Kyushu Ltd フルカットダイシング用テープ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493320A (cs) * 1972-05-02 1974-01-12
JPS5342458Y2 (cs) * 1973-12-24 1978-10-13
NL7404364A (nl) * 1974-04-01 1975-10-03 Philips Nv Werkwijze en inrichting voor het bewerken van vlakke voorwerpen.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6391475U (cs) * 1986-12-04 1988-06-13

Also Published As

Publication number Publication date
JPS5364463A (en) 1978-06-08

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