JPS5353962A - Production of semicnductor wafers - Google Patents

Production of semicnductor wafers

Info

Publication number
JPS5353962A
JPS5353962A JP12825376A JP12825376A JPS5353962A JP S5353962 A JPS5353962 A JP S5353962A JP 12825376 A JP12825376 A JP 12825376A JP 12825376 A JP12825376 A JP 12825376A JP S5353962 A JPS5353962 A JP S5353962A
Authority
JP
Japan
Prior art keywords
semicnductor
wafers
production
wafer
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12825376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5515857B2 (enrdf_load_stackoverflow
Inventor
Taiji Usui
Susumu Matsuoka
Yutaka Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP12825376A priority Critical patent/JPS5353962A/ja
Publication of JPS5353962A publication Critical patent/JPS5353962A/ja
Publication of JPS5515857B2 publication Critical patent/JPS5515857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Element Separation (AREA)
JP12825376A 1976-10-27 1976-10-27 Production of semicnductor wafers Granted JPS5353962A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12825376A JPS5353962A (en) 1976-10-27 1976-10-27 Production of semicnductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12825376A JPS5353962A (en) 1976-10-27 1976-10-27 Production of semicnductor wafers

Publications (2)

Publication Number Publication Date
JPS5353962A true JPS5353962A (en) 1978-05-16
JPS5515857B2 JPS5515857B2 (enrdf_load_stackoverflow) 1980-04-26

Family

ID=14980271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12825376A Granted JPS5353962A (en) 1976-10-27 1976-10-27 Production of semicnductor wafers

Country Status (1)

Country Link
JP (1) JPS5353962A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208841A (ja) * 1984-04-02 1985-10-21 Oki Electric Ind Co Ltd 誘電体分離基板の製造方法
JPS61123128A (ja) * 1984-11-07 1986-06-11 Fujitsu Ltd プラズマ反応装置
JPS6357737U (enrdf_load_stackoverflow) * 1986-10-02 1988-04-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208841A (ja) * 1984-04-02 1985-10-21 Oki Electric Ind Co Ltd 誘電体分離基板の製造方法
JPS61123128A (ja) * 1984-11-07 1986-06-11 Fujitsu Ltd プラズマ反応装置
JPS6357737U (enrdf_load_stackoverflow) * 1986-10-02 1988-04-18

Also Published As

Publication number Publication date
JPS5515857B2 (enrdf_load_stackoverflow) 1980-04-26

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