JPS5515857B2 - - Google Patents

Info

Publication number
JPS5515857B2
JPS5515857B2 JP12825376A JP12825376A JPS5515857B2 JP S5515857 B2 JPS5515857 B2 JP S5515857B2 JP 12825376 A JP12825376 A JP 12825376A JP 12825376 A JP12825376 A JP 12825376A JP S5515857 B2 JPS5515857 B2 JP S5515857B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12825376A
Other languages
Japanese (ja)
Other versions
JPS5353962A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12825376A priority Critical patent/JPS5353962A/ja
Publication of JPS5353962A publication Critical patent/JPS5353962A/ja
Publication of JPS5515857B2 publication Critical patent/JPS5515857B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Element Separation (AREA)
JP12825376A 1976-10-27 1976-10-27 Production of semicnductor wafers Granted JPS5353962A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12825376A JPS5353962A (en) 1976-10-27 1976-10-27 Production of semicnductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12825376A JPS5353962A (en) 1976-10-27 1976-10-27 Production of semicnductor wafers

Publications (2)

Publication Number Publication Date
JPS5353962A JPS5353962A (en) 1978-05-16
JPS5515857B2 true JPS5515857B2 (enrdf_load_stackoverflow) 1980-04-26

Family

ID=14980271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12825376A Granted JPS5353962A (en) 1976-10-27 1976-10-27 Production of semicnductor wafers

Country Status (1)

Country Link
JP (1) JPS5353962A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208841A (ja) * 1984-04-02 1985-10-21 Oki Electric Ind Co Ltd 誘電体分離基板の製造方法
JPS61123128A (ja) * 1984-11-07 1986-06-11 Fujitsu Ltd プラズマ反応装置
JPS6357737U (enrdf_load_stackoverflow) * 1986-10-02 1988-04-18

Also Published As

Publication number Publication date
JPS5353962A (en) 1978-05-16

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