JPS5310278A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5310278A
JPS5310278A JP8544676A JP8544676A JPS5310278A JP S5310278 A JPS5310278 A JP S5310278A JP 8544676 A JP8544676 A JP 8544676A JP 8544676 A JP8544676 A JP 8544676A JP S5310278 A JPS5310278 A JP S5310278A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wafer
evade
breakage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8544676A
Other languages
Japanese (ja)
Inventor
Kazuo Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8544676A priority Critical patent/JPS5310278A/en
Publication of JPS5310278A publication Critical patent/JPS5310278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)

Abstract

PURPOSE: To evade the breakage of large diameter wafers by forming undulations composed of arbitrary repetitive shapes on a semiconductor wafer, obtaining the basic electrical characteristics of semiconductor devices on both surfaces of the recessed portions and reinforcing the wafer with the raised portions.
COPYRIGHT: (C)1978,JPO&Japio
JP8544676A 1976-07-16 1976-07-16 Production of semiconductor device Pending JPS5310278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8544676A JPS5310278A (en) 1976-07-16 1976-07-16 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8544676A JPS5310278A (en) 1976-07-16 1976-07-16 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5310278A true JPS5310278A (en) 1978-01-30

Family

ID=13859091

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8544676A Pending JPS5310278A (en) 1976-07-16 1976-07-16 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5310278A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5689612U (en) * 1979-12-14 1981-07-17

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827495A (en) * 1971-08-12 1973-04-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4827495A (en) * 1971-08-12 1973-04-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5689612U (en) * 1979-12-14 1981-07-17

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