JPS5350977A - Semiconductor surface treating agent - Google Patents

Semiconductor surface treating agent

Info

Publication number
JPS5350977A
JPS5350977A JP12547776A JP12547776A JPS5350977A JP S5350977 A JPS5350977 A JP S5350977A JP 12547776 A JP12547776 A JP 12547776A JP 12547776 A JP12547776 A JP 12547776A JP S5350977 A JPS5350977 A JP S5350977A
Authority
JP
Japan
Prior art keywords
treating agent
surface treating
semiconductor surface
solution
trialkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12547776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5540183B2 (cs
Inventor
Hisashi Muraoka
Masafumi Asano
Taizo Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12547776A priority Critical patent/JPS5350977A/ja
Publication of JPS5350977A publication Critical patent/JPS5350977A/ja
Publication of JPS5540183B2 publication Critical patent/JPS5540183B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Weting (AREA)
JP12547776A 1976-10-21 1976-10-21 Semiconductor surface treating agent Granted JPS5350977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12547776A JPS5350977A (en) 1976-10-21 1976-10-21 Semiconductor surface treating agent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12547776A JPS5350977A (en) 1976-10-21 1976-10-21 Semiconductor surface treating agent

Publications (2)

Publication Number Publication Date
JPS5350977A true JPS5350977A (en) 1978-05-09
JPS5540183B2 JPS5540183B2 (cs) 1980-10-16

Family

ID=14911047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12547776A Granted JPS5350977A (en) 1976-10-21 1976-10-21 Semiconductor surface treating agent

Country Status (1)

Country Link
JP (1) JPS5350977A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5580846A (en) * 1994-01-28 1996-12-03 Wako Pure Chemical Industries, Ltd. Surface treating agents and treating process for semiconductors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5580846A (en) * 1994-01-28 1996-12-03 Wako Pure Chemical Industries, Ltd. Surface treating agents and treating process for semiconductors

Also Published As

Publication number Publication date
JPS5540183B2 (cs) 1980-10-16

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