JPS5349964A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5349964A
JPS5349964A JP12380176A JP12380176A JPS5349964A JP S5349964 A JPS5349964 A JP S5349964A JP 12380176 A JP12380176 A JP 12380176A JP 12380176 A JP12380176 A JP 12380176A JP S5349964 A JPS5349964 A JP S5349964A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
insulator film
minimize
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12380176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214948B2 (enrdf_load_stackoverflow
Inventor
Akio Anzai
Takaaki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12380176A priority Critical patent/JPS5349964A/ja
Publication of JPS5349964A publication Critical patent/JPS5349964A/ja
Publication of JPS6214948B2 publication Critical patent/JPS6214948B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP12380176A 1976-10-18 1976-10-18 Manufacture of semiconductor device Granted JPS5349964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12380176A JPS5349964A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12380176A JPS5349964A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5349964A true JPS5349964A (en) 1978-05-06
JPS6214948B2 JPS6214948B2 (enrdf_load_stackoverflow) 1987-04-04

Family

ID=14869642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12380176A Granted JPS5349964A (en) 1976-10-18 1976-10-18 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5349964A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135965A (en) * 1980-03-28 1981-10-23 Nec Corp Semiconductor device
US6829030B2 (en) 2000-06-15 2004-12-07 Seiko Epson Corporation Electro-optic device and electronic apparatus

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498228A (enrdf_load_stackoverflow) * 1972-03-23 1974-01-24
JPS509390A (enrdf_load_stackoverflow) * 1973-05-22 1975-01-30
JPS5010579A (enrdf_load_stackoverflow) * 1973-05-25 1975-02-03
JPS50130374A (enrdf_load_stackoverflow) * 1974-03-30 1975-10-15

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS498228A (enrdf_load_stackoverflow) * 1972-03-23 1974-01-24
JPS509390A (enrdf_load_stackoverflow) * 1973-05-22 1975-01-30
JPS5010579A (enrdf_load_stackoverflow) * 1973-05-25 1975-02-03
JPS50130374A (enrdf_load_stackoverflow) * 1974-03-30 1975-10-15

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56135965A (en) * 1980-03-28 1981-10-23 Nec Corp Semiconductor device
US6829030B2 (en) 2000-06-15 2004-12-07 Seiko Epson Corporation Electro-optic device and electronic apparatus
US6963384B2 (en) 2000-06-15 2005-11-08 Seiko Epson Corporation Electro-optical device and electronic apparatus

Also Published As

Publication number Publication date
JPS6214948B2 (enrdf_load_stackoverflow) 1987-04-04

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