JPS5342675A - Single crystal device and its production - Google Patents

Single crystal device and its production

Info

Publication number
JPS5342675A
JPS5342675A JP11812676A JP11812676A JPS5342675A JP S5342675 A JPS5342675 A JP S5342675A JP 11812676 A JP11812676 A JP 11812676A JP 11812676 A JP11812676 A JP 11812676A JP S5342675 A JPS5342675 A JP S5342675A
Authority
JP
Japan
Prior art keywords
production
single crystal
crystal device
submicrons
masks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11812676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5625015B2 (OSRAM
Inventor
Seiichi Nagata
Tsuneo Tanaka
Shoichi Fukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11812676A priority Critical patent/JPS5342675A/ja
Priority to US05/815,303 priority patent/US4171234A/en
Priority to GB29739/77A priority patent/GB1589455A/en
Priority to DE2732807A priority patent/DE2732807C2/de
Priority to FR7722251A priority patent/FR2358921A1/fr
Publication of JPS5342675A publication Critical patent/JPS5342675A/ja
Publication of JPS5625015B2 publication Critical patent/JPS5625015B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP11812676A 1976-07-20 1976-09-30 Single crystal device and its production Granted JPS5342675A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP11812676A JPS5342675A (en) 1976-09-30 1976-09-30 Single crystal device and its production
US05/815,303 US4171234A (en) 1976-07-20 1977-07-13 Method of fabricating three-dimensional epitaxial layers utilizing molecular beams of varied angles
GB29739/77A GB1589455A (en) 1976-07-20 1977-07-15 Crystals and the manufacture thereof
DE2732807A DE2732807C2 (de) 1976-07-20 1977-07-20 Verfahren zur Herstellung eines Halbleiter-Bauelementes mit einer Einkristallstruktur
FR7722251A FR2358921A1 (fr) 1976-07-20 1977-07-20 Dispositif a monocristal et procede pour sa fabrication

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11812676A JPS5342675A (en) 1976-09-30 1976-09-30 Single crystal device and its production

Publications (2)

Publication Number Publication Date
JPS5342675A true JPS5342675A (en) 1978-04-18
JPS5625015B2 JPS5625015B2 (OSRAM) 1981-06-10

Family

ID=14728671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11812676A Granted JPS5342675A (en) 1976-07-20 1976-09-30 Single crystal device and its production

Country Status (1)

Country Link
JP (1) JPS5342675A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153322A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Molecular beam epitaxial growth
JPH01235324A (ja) * 1988-03-16 1989-09-20 Hikari Gijutsu Kenkyu Kaihatsu Kk 化合物半導体薄膜結晶の成長方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55153322A (en) * 1979-05-18 1980-11-29 Fujitsu Ltd Molecular beam epitaxial growth
JPH01235324A (ja) * 1988-03-16 1989-09-20 Hikari Gijutsu Kenkyu Kaihatsu Kk 化合物半導体薄膜結晶の成長方法

Also Published As

Publication number Publication date
JPS5625015B2 (OSRAM) 1981-06-10

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