JPS53136484A - Wafer continuous machining method and unit used for the same - Google Patents
Wafer continuous machining method and unit used for the sameInfo
- Publication number
- JPS53136484A JPS53136484A JP5076477A JP5076477A JPS53136484A JP S53136484 A JPS53136484 A JP S53136484A JP 5076477 A JP5076477 A JP 5076477A JP 5076477 A JP5076477 A JP 5076477A JP S53136484 A JPS53136484 A JP S53136484A
- Authority
- JP
- Japan
- Prior art keywords
- same
- unit used
- machining method
- continuous machining
- wafer continuous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable to continuously process the desired machining process, by extremely increasing the amount of substrate placed on the device and lengthening the cartridge supply interval.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5076477A JPS53136484A (en) | 1977-05-04 | 1977-05-04 | Wafer continuous machining method and unit used for the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5076477A JPS53136484A (en) | 1977-05-04 | 1977-05-04 | Wafer continuous machining method and unit used for the same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5589485A Division JPS60242634A (en) | 1985-03-22 | 1985-03-22 | Wafer processing apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53136484A true JPS53136484A (en) | 1978-11-29 |
Family
ID=12867891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5076477A Pending JPS53136484A (en) | 1977-05-04 | 1977-05-04 | Wafer continuous machining method and unit used for the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53136484A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57152142A (en) * | 1981-03-17 | 1982-09-20 | Nec Kyushu Ltd | Transferring device of semiconductor substrate |
JPS60242634A (en) * | 1985-03-22 | 1985-12-02 | Hitachi Ltd | Wafer processing apparatus |
US11193548B2 (en) | 2017-06-16 | 2021-12-07 | Polaris Industries Inc. | Brake assembly shield and scraper |
-
1977
- 1977-05-04 JP JP5076477A patent/JPS53136484A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57152142A (en) * | 1981-03-17 | 1982-09-20 | Nec Kyushu Ltd | Transferring device of semiconductor substrate |
JPS60242634A (en) * | 1985-03-22 | 1985-12-02 | Hitachi Ltd | Wafer processing apparatus |
US11193548B2 (en) | 2017-06-16 | 2021-12-07 | Polaris Industries Inc. | Brake assembly shield and scraper |
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