JPS53136484A - Wafer continuous machining method and unit used for the same - Google Patents

Wafer continuous machining method and unit used for the same

Info

Publication number
JPS53136484A
JPS53136484A JP5076477A JP5076477A JPS53136484A JP S53136484 A JPS53136484 A JP S53136484A JP 5076477 A JP5076477 A JP 5076477A JP 5076477 A JP5076477 A JP 5076477A JP S53136484 A JPS53136484 A JP S53136484A
Authority
JP
Japan
Prior art keywords
same
unit used
machining method
continuous machining
wafer continuous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5076477A
Other languages
Japanese (ja)
Inventor
Toshio Hashimoto
Kenichi Ikeda
Toshio Nohara
Akira Minoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP5076477A priority Critical patent/JPS53136484A/en
Publication of JPS53136484A publication Critical patent/JPS53136484A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable to continuously process the desired machining process, by extremely increasing the amount of substrate placed on the device and lengthening the cartridge supply interval.
COPYRIGHT: (C)1978,JPO&Japio
JP5076477A 1977-05-04 1977-05-04 Wafer continuous machining method and unit used for the same Pending JPS53136484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5076477A JPS53136484A (en) 1977-05-04 1977-05-04 Wafer continuous machining method and unit used for the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5076477A JPS53136484A (en) 1977-05-04 1977-05-04 Wafer continuous machining method and unit used for the same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP5589485A Division JPS60242634A (en) 1985-03-22 1985-03-22 Wafer processing apparatus

Publications (1)

Publication Number Publication Date
JPS53136484A true JPS53136484A (en) 1978-11-29

Family

ID=12867891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5076477A Pending JPS53136484A (en) 1977-05-04 1977-05-04 Wafer continuous machining method and unit used for the same

Country Status (1)

Country Link
JP (1) JPS53136484A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152142A (en) * 1981-03-17 1982-09-20 Nec Kyushu Ltd Transferring device of semiconductor substrate
JPS60242634A (en) * 1985-03-22 1985-12-02 Hitachi Ltd Wafer processing apparatus
US11193548B2 (en) 2017-06-16 2021-12-07 Polaris Industries Inc. Brake assembly shield and scraper

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152142A (en) * 1981-03-17 1982-09-20 Nec Kyushu Ltd Transferring device of semiconductor substrate
JPS60242634A (en) * 1985-03-22 1985-12-02 Hitachi Ltd Wafer processing apparatus
US11193548B2 (en) 2017-06-16 2021-12-07 Polaris Industries Inc. Brake assembly shield and scraper

Similar Documents

Publication Publication Date Title
JPS5251327A (en) 3-trihydroxygermylpropionic acid and its salts and process for prepari ng the same
JPS53133861A (en) Article supply apparatus having space regulating device
JPS53136484A (en) Wafer continuous machining method and unit used for the same
JPS5215046A (en) Method of reducing support force by liquid
JPS53570A (en) Aligning apparatus for rod-like articles
JPS5324188A (en) Device for controlling work engaged at predetermined suitable interval and for forming work
JPS51114445A (en) An apparatus for controlling a coating process
JPS51129903A (en) High precision supply process of non- compresive fluid
JPS5382039A (en) Constant temperature control apparatus
JPS53140687A (en) Clamping device
JPS5296471A (en) Apparatus for supplying parts to automatical assembler
JPS51122256A (en) Part supply regulating apparatus
JPS5439701A (en) Method of forming anti-oxidation protective film in condenser/water supply system
JPS51148684A (en) Process for removal of oxygen
JPS5237375A (en) Device for aranging moving intervals of articles to be carried
JPS53141284A (en) N u4 -dialkylaminomethylenearabinofuranosylcytosine and process for its preparation
JPS5237653A (en) Prevention of a bolt from falling off
JPS5390584A (en) Pre-heated fluid control method
JPS51130951A (en) Thermoregulator utilizing heat pipe
JPS5219183A (en) Electrodialysis process
JPS5299065A (en) Production of semiconductor device
JPS51147244A (en) Adjustment system of coder
JPS52126941A (en) Method and apparatus for controlling excessive sludge amount
JPS51146541A (en) Coating method and apparatus
JPS53142170A (en) Defect analysis method for semiconductor