JPS5340270A - Semiconductor distribution measuring method - Google Patents

Semiconductor distribution measuring method

Info

Publication number
JPS5340270A
JPS5340270A JP11562976A JP11562976A JPS5340270A JP S5340270 A JPS5340270 A JP S5340270A JP 11562976 A JP11562976 A JP 11562976A JP 11562976 A JP11562976 A JP 11562976A JP S5340270 A JPS5340270 A JP S5340270A
Authority
JP
Japan
Prior art keywords
measuring method
distribution measuring
semiconductor
semiconductor distribution
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11562976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS542540B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shunji Nojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP11562976A priority Critical patent/JPS5340270A/ja
Publication of JPS5340270A publication Critical patent/JPS5340270A/ja
Publication of JPS542540B2 publication Critical patent/JPS542540B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11562976A 1976-09-27 1976-09-27 Semiconductor distribution measuring method Granted JPS5340270A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11562976A JPS5340270A (en) 1976-09-27 1976-09-27 Semiconductor distribution measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11562976A JPS5340270A (en) 1976-09-27 1976-09-27 Semiconductor distribution measuring method

Publications (2)

Publication Number Publication Date
JPS5340270A true JPS5340270A (en) 1978-04-12
JPS542540B2 JPS542540B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-02-08

Family

ID=14667370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11562976A Granted JPS5340270A (en) 1976-09-27 1976-09-27 Semiconductor distribution measuring method

Country Status (1)

Country Link
JP (1) JPS5340270A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539627A (en) * 1978-09-14 1980-03-19 Nippon Telegr & Teleph Corp <Ntt> Automatic device for measuring specific resistance distribution of semiconductor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539627A (en) * 1978-09-14 1980-03-19 Nippon Telegr & Teleph Corp <Ntt> Automatic device for measuring specific resistance distribution of semiconductor

Also Published As

Publication number Publication date
JPS542540B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-02-08

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