JPS5339879A - Production of silicon gate mis semiconductor device - Google Patents
Production of silicon gate mis semiconductor deviceInfo
- Publication number
- JPS5339879A JPS5339879A JP11368876A JP11368876A JPS5339879A JP S5339879 A JPS5339879 A JP S5339879A JP 11368876 A JP11368876 A JP 11368876A JP 11368876 A JP11368876 A JP 11368876A JP S5339879 A JPS5339879 A JP S5339879A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- silicon gate
- mis semiconductor
- gate mis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To obtain a device of a high scale of integration by making use of the difference in thermal ocidation rate between a Si substrate to become source and drain and poly-Si for gate electrodes in forming both layers and thir contact windows through selfalignment.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11368876A JPS60788B2 (en) | 1976-09-24 | 1976-09-24 | Manufacturing method of silicon gate MIS semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11368876A JPS60788B2 (en) | 1976-09-24 | 1976-09-24 | Manufacturing method of silicon gate MIS semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5339879A true JPS5339879A (en) | 1978-04-12 |
JPS60788B2 JPS60788B2 (en) | 1985-01-10 |
Family
ID=14618652
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11368876A Expired JPS60788B2 (en) | 1976-09-24 | 1976-09-24 | Manufacturing method of silicon gate MIS semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60788B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63181123U (en) * | 1987-05-15 | 1988-11-22 |
-
1976
- 1976-09-24 JP JP11368876A patent/JPS60788B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS60788B2 (en) | 1985-01-10 |
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