JPS5329074A - Plasma treating apparatus for semiconductor - Google Patents

Plasma treating apparatus for semiconductor

Info

Publication number
JPS5329074A
JPS5329074A JP10323676A JP10323676A JPS5329074A JP S5329074 A JPS5329074 A JP S5329074A JP 10323676 A JP10323676 A JP 10323676A JP 10323676 A JP10323676 A JP 10323676A JP S5329074 A JPS5329074 A JP S5329074A
Authority
JP
Japan
Prior art keywords
semiconductor
treating apparatus
plasma treating
plasma
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10323676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS543343B2 (index.php
Inventor
Kazuo Niwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10323676A priority Critical patent/JPS5329074A/ja
Priority to US05/828,812 priority patent/US4138306A/en
Publication of JPS5329074A publication Critical patent/JPS5329074A/ja
Publication of JPS543343B2 publication Critical patent/JPS543343B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP10323676A 1976-08-31 1976-08-31 Plasma treating apparatus for semiconductor Granted JPS5329074A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10323676A JPS5329074A (en) 1976-08-31 1976-08-31 Plasma treating apparatus for semiconductor
US05/828,812 US4138306A (en) 1976-08-31 1977-08-29 Apparatus for the treatment of semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10323676A JPS5329074A (en) 1976-08-31 1976-08-31 Plasma treating apparatus for semiconductor

Publications (2)

Publication Number Publication Date
JPS5329074A true JPS5329074A (en) 1978-03-17
JPS543343B2 JPS543343B2 (index.php) 1979-02-21

Family

ID=14348803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10323676A Granted JPS5329074A (en) 1976-08-31 1976-08-31 Plasma treating apparatus for semiconductor

Country Status (1)

Country Link
JP (1) JPS5329074A (index.php)

Also Published As

Publication number Publication date
JPS543343B2 (index.php) 1979-02-21

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