JPS5327378A - Semiconduct or pressure sensor - Google Patents

Semiconduct or pressure sensor

Info

Publication number
JPS5327378A
JPS5327378A JP10115076A JP10115076A JPS5327378A JP S5327378 A JPS5327378 A JP S5327378A JP 10115076 A JP10115076 A JP 10115076A JP 10115076 A JP10115076 A JP 10115076A JP S5327378 A JPS5327378 A JP S5327378A
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconduct
resistance change
type mis
mis element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10115076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5635314B2 (show.php
Inventor
Kazumichi Omura
Shinji Onga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP10115076A priority Critical patent/JPS5327378A/ja
Publication of JPS5327378A publication Critical patent/JPS5327378A/ja
Publication of JPS5635314B2 publication Critical patent/JPS5635314B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP10115076A 1976-08-26 1976-08-26 Semiconduct or pressure sensor Granted JPS5327378A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10115076A JPS5327378A (en) 1976-08-26 1976-08-26 Semiconduct or pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10115076A JPS5327378A (en) 1976-08-26 1976-08-26 Semiconduct or pressure sensor

Publications (2)

Publication Number Publication Date
JPS5327378A true JPS5327378A (en) 1978-03-14
JPS5635314B2 JPS5635314B2 (show.php) 1981-08-15

Family

ID=14293023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10115076A Granted JPS5327378A (en) 1976-08-26 1976-08-26 Semiconduct or pressure sensor

Country Status (1)

Country Link
JP (1) JPS5327378A (show.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046990A (ja) * 2005-08-09 2007-02-22 Hitachi Ltd 計量機能を具備する物品容器及びその物品容器を用いた物品管理システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046990A (ja) * 2005-08-09 2007-02-22 Hitachi Ltd 計量機能を具備する物品容器及びその物品容器を用いた物品管理システム

Also Published As

Publication number Publication date
JPS5635314B2 (show.php) 1981-08-15

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