JPS5327378A - Semiconduct or pressure sensor - Google Patents

Semiconduct or pressure sensor

Info

Publication number
JPS5327378A
JPS5327378A JP10115076A JP10115076A JPS5327378A JP S5327378 A JPS5327378 A JP S5327378A JP 10115076 A JP10115076 A JP 10115076A JP 10115076 A JP10115076 A JP 10115076A JP S5327378 A JPS5327378 A JP S5327378A
Authority
JP
Japan
Prior art keywords
pressure sensor
semiconduct
resistance change
type mis
mis element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10115076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5635314B2 (member.php
Inventor
Kazumichi Omura
Shinji Onga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP10115076A priority Critical patent/JPS5327378A/ja
Publication of JPS5327378A publication Critical patent/JPS5327378A/ja
Publication of JPS5635314B2 publication Critical patent/JPS5635314B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP10115076A 1976-08-26 1976-08-26 Semiconduct or pressure sensor Granted JPS5327378A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10115076A JPS5327378A (en) 1976-08-26 1976-08-26 Semiconduct or pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10115076A JPS5327378A (en) 1976-08-26 1976-08-26 Semiconduct or pressure sensor

Publications (2)

Publication Number Publication Date
JPS5327378A true JPS5327378A (en) 1978-03-14
JPS5635314B2 JPS5635314B2 (member.php) 1981-08-15

Family

ID=14293023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10115076A Granted JPS5327378A (en) 1976-08-26 1976-08-26 Semiconduct or pressure sensor

Country Status (1)

Country Link
JP (1) JPS5327378A (member.php)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046990A (ja) * 2005-08-09 2007-02-22 Hitachi Ltd 計量機能を具備する物品容器及びその物品容器を用いた物品管理システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046990A (ja) * 2005-08-09 2007-02-22 Hitachi Ltd 計量機能を具備する物品容器及びその物品容器を用いた物品管理システム

Also Published As

Publication number Publication date
JPS5635314B2 (member.php) 1981-08-15

Similar Documents

Publication Publication Date Title
AU501927B2 (en) I. c. engine roughness sensor
JPS53114690A (en) Thin film strain gauge convertor
JPS5365066A (en) Semiconductor device
JPS5327378A (en) Semiconduct or pressure sensor
JPS5322385A (en) Diffusion type semiconductor pr essure receiving element
JPS53114685A (en) Manufacture for semiconductor device
JPS52101065A (en) Magnetic scale
JPS52124889A (en) Semiconductor photoelectric transducer
JPS5387188A (en) Semiconductor device
JPS5353266A (en) Probe card
JPS5380160A (en) Manufacture of substrate for semiconductor device
JPS5333398A (en) Permalloy film for babble element
JPS5289083A (en) Production of semiconductor photoelectric converting element
JPS52127275A (en) Temperature compensation circuit for pressure trnsmitter
JPS5346222A (en) Solid state pick up unit
JPS5350989A (en) Production of photoconductive film
JPS5237017A (en) Tape position detecting device
JPS5251880A (en) Moisture sensitive element
JPS5286747A (en) Mark detecting circuit
JPS5325356A (en) Wire bonding device
JPS52146699A (en) Production of combustible gas detecting element
JPS5210184A (en) Temperature pressure detecting device
JPS53119693A (en) Semiconductor pressure transducer
JPS53107382A (en) Thermal conductivity measuring device of thin film form members
JPS5333193A (en) Measuring apparatus of transformed quantity at diffusion welding