JPS5318964A - X-ray projection and exposure system - Google Patents

X-ray projection and exposure system

Info

Publication number
JPS5318964A
JPS5318964A JP9322976A JP9322976A JPS5318964A JP S5318964 A JPS5318964 A JP S5318964A JP 9322976 A JP9322976 A JP 9322976A JP 9322976 A JP9322976 A JP 9322976A JP S5318964 A JPS5318964 A JP S5318964A
Authority
JP
Japan
Prior art keywords
exposure system
ray projection
mask
ray
margin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9322976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5322429B2 (cs
Inventor
Toa Hayasaka
Satoru Nakayama
Shinichi Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP9322976A priority Critical patent/JPS5318964A/ja
Publication of JPS5318964A publication Critical patent/JPS5318964A/ja
Publication of JPS5322429B2 publication Critical patent/JPS5322429B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9322976A 1976-08-06 1976-08-06 X-ray projection and exposure system Granted JPS5318964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9322976A JPS5318964A (en) 1976-08-06 1976-08-06 X-ray projection and exposure system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9322976A JPS5318964A (en) 1976-08-06 1976-08-06 X-ray projection and exposure system

Publications (2)

Publication Number Publication Date
JPS5318964A true JPS5318964A (en) 1978-02-21
JPS5322429B2 JPS5322429B2 (cs) 1978-07-08

Family

ID=14076704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9322976A Granted JPS5318964A (en) 1976-08-06 1976-08-06 X-ray projection and exposure system

Country Status (1)

Country Link
JP (1) JPS5318964A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718076A (en) * 1983-04-22 1988-01-05 Kabushiki Kaisha Toshiba X-ray imaging apparatus
JPH07209876A (ja) * 1995-01-30 1995-08-11 Canon Inc Ｘ線転写装置及び方法
JP2000098091A (ja) * 1998-09-28 2000-04-07 Rigaku Corp ソーラスリット及びｘ線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718076A (en) * 1983-04-22 1988-01-05 Kabushiki Kaisha Toshiba X-ray imaging apparatus
JPH07209876A (ja) * 1995-01-30 1995-08-11 Canon Inc Ｘ線転写装置及び方法
JP2000098091A (ja) * 1998-09-28 2000-04-07 Rigaku Corp ソーラスリット及びｘ線装置

Also Published As

Publication number Publication date
JPS5322429B2 (cs) 1978-07-08

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