JPS5315756A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5315756A
JPS5315756A JP9064376A JP9064376A JPS5315756A JP S5315756 A JPS5315756 A JP S5315756A JP 9064376 A JP9064376 A JP 9064376A JP 9064376 A JP9064376 A JP 9064376A JP S5315756 A JPS5315756 A JP S5315756A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
conductivity type
junctions
diffusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9064376A
Other languages
Japanese (ja)
Inventor
Kaname Otaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9064376A priority Critical patent/JPS5315756A/en
Publication of JPS5315756A publication Critical patent/JPS5315756A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To increase the breakdown voltage of planer type PN junctions by diffusing a second conductivity type impurity onto a first conductivity type substrate through the insulator of a tapered form thickness at openings.
COPYRIGHT: (C)1978,JPO&Japio
JP9064376A 1976-07-28 1976-07-28 Production of semiconductor device Pending JPS5315756A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9064376A JPS5315756A (en) 1976-07-28 1976-07-28 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9064376A JPS5315756A (en) 1976-07-28 1976-07-28 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5315756A true JPS5315756A (en) 1978-02-14

Family

ID=14004176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9064376A Pending JPS5315756A (en) 1976-07-28 1976-07-28 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5315756A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320825A (en) * 1986-07-14 1988-01-28 Mitsubishi Electric Corp Diffusion method for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320825A (en) * 1986-07-14 1988-01-28 Mitsubishi Electric Corp Diffusion method for semiconductor device

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