JPS53148983A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53148983A JPS53148983A JP6335577A JP6335577A JPS53148983A JP S53148983 A JPS53148983 A JP S53148983A JP 6335577 A JP6335577 A JP 6335577A JP 6335577 A JP6335577 A JP 6335577A JP S53148983 A JPS53148983 A JP S53148983A
- Authority
- JP
- Japan
- Prior art keywords
- gate
- manufacture
- semiconductor device
- electoode
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the deterioration for both the gate leak and the gate insulation breakage voltage, by covering previously the cavity which is caused by the side etching of the poly-crystal Si gate electoode with the SiO2 film of 200-400 Å thick before the diffusion formation of the source and the drain regions.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6335577A JPS53148983A (en) | 1977-06-01 | 1977-06-01 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6335577A JPS53148983A (en) | 1977-06-01 | 1977-06-01 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53148983A true JPS53148983A (en) | 1978-12-26 |
Family
ID=13226848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6335577A Pending JPS53148983A (en) | 1977-06-01 | 1977-06-01 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53148983A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5787173A (en) * | 1980-11-20 | 1982-05-31 | Seiko Epson Corp | Manufacture of semiconductor integrated circuit |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4849382A (en) * | 1971-10-22 | 1973-07-12 | ||
JPS50134777A (en) * | 1974-04-15 | 1975-10-25 | ||
JPS5153485A (en) * | 1974-11-06 | 1976-05-11 | Hitachi Ltd | mis gatadenkaikokahandotaisochino seizoho |
-
1977
- 1977-06-01 JP JP6335577A patent/JPS53148983A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4849382A (en) * | 1971-10-22 | 1973-07-12 | ||
JPS50134777A (en) * | 1974-04-15 | 1975-10-25 | ||
JPS5153485A (en) * | 1974-11-06 | 1976-05-11 | Hitachi Ltd | mis gatadenkaikokahandotaisochino seizoho |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5787173A (en) * | 1980-11-20 | 1982-05-31 | Seiko Epson Corp | Manufacture of semiconductor integrated circuit |
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