JPS53148983A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53148983A
JPS53148983A JP6335577A JP6335577A JPS53148983A JP S53148983 A JPS53148983 A JP S53148983A JP 6335577 A JP6335577 A JP 6335577A JP 6335577 A JP6335577 A JP 6335577A JP S53148983 A JPS53148983 A JP S53148983A
Authority
JP
Japan
Prior art keywords
gate
manufacture
semiconductor device
electoode
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6335577A
Other languages
Japanese (ja)
Inventor
Tadashi Mori
Masayoshi Ino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP6335577A priority Critical patent/JPS53148983A/en
Publication of JPS53148983A publication Critical patent/JPS53148983A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the deterioration for both the gate leak and the gate insulation breakage voltage, by covering previously the cavity which is caused by the side etching of the poly-crystal Si gate electoode with the SiO2 film of 200-400 Å thick before the diffusion formation of the source and the drain regions.
COPYRIGHT: (C)1978,JPO&Japio
JP6335577A 1977-06-01 1977-06-01 Manufacture of semiconductor device Pending JPS53148983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6335577A JPS53148983A (en) 1977-06-01 1977-06-01 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6335577A JPS53148983A (en) 1977-06-01 1977-06-01 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53148983A true JPS53148983A (en) 1978-12-26

Family

ID=13226848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6335577A Pending JPS53148983A (en) 1977-06-01 1977-06-01 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53148983A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787173A (en) * 1980-11-20 1982-05-31 Seiko Epson Corp Manufacture of semiconductor integrated circuit

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849382A (en) * 1971-10-22 1973-07-12
JPS50134777A (en) * 1974-04-15 1975-10-25
JPS5153485A (en) * 1974-11-06 1976-05-11 Hitachi Ltd mis gatadenkaikokahandotaisochino seizoho

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849382A (en) * 1971-10-22 1973-07-12
JPS50134777A (en) * 1974-04-15 1975-10-25
JPS5153485A (en) * 1974-11-06 1976-05-11 Hitachi Ltd mis gatadenkaikokahandotaisochino seizoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787173A (en) * 1980-11-20 1982-05-31 Seiko Epson Corp Manufacture of semiconductor integrated circuit

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