JPS53144891A - Method and apparatus for production of inorganic compound - Google Patents

Method and apparatus for production of inorganic compound

Info

Publication number
JPS53144891A
JPS53144891A JP5988277A JP5988277A JPS53144891A JP S53144891 A JPS53144891 A JP S53144891A JP 5988277 A JP5988277 A JP 5988277A JP 5988277 A JP5988277 A JP 5988277A JP S53144891 A JPS53144891 A JP S53144891A
Authority
JP
Japan
Prior art keywords
production
inorganic compound
cpds
inorg
cpd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5988277A
Other languages
Japanese (ja)
Other versions
JPS5538425B2 (en
Inventor
Hideo Yoshihara
Mikiho Kiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP5988277A priority Critical patent/JPS53144891A/en
Publication of JPS53144891A publication Critical patent/JPS53144891A/en
Publication of JPS5538425B2 publication Critical patent/JPS5538425B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/517—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups C23C16/503 - C23C16/515

Abstract

PURPOSE:To obtain thin film of an inorg. cpd. which is difficult to be formed because of its high m.p. and high hardness, by forming plasma through application of high frequency wave to two kinds or more of cpds. or elements which are fed as gas or vapor, and by irradiation of a substrate with electrons having high kinetic energy.
JP5988277A 1977-05-25 1977-05-25 Method and apparatus for production of inorganic compound Granted JPS53144891A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5988277A JPS53144891A (en) 1977-05-25 1977-05-25 Method and apparatus for production of inorganic compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5988277A JPS53144891A (en) 1977-05-25 1977-05-25 Method and apparatus for production of inorganic compound

Publications (2)

Publication Number Publication Date
JPS53144891A true JPS53144891A (en) 1978-12-16
JPS5538425B2 JPS5538425B2 (en) 1980-10-03

Family

ID=13125948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5988277A Granted JPS53144891A (en) 1977-05-25 1977-05-25 Method and apparatus for production of inorganic compound

Country Status (1)

Country Link
JP (1) JPS53144891A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773175A (en) * 1980-10-23 1982-05-07 Kobe Steel Ltd Chemical vapor deposition device
EP0095384A2 (en) * 1982-05-26 1983-11-30 Konica Corporation Vacuum deposition apparatus
JPS61194809A (en) * 1985-02-25 1986-08-29 Toshiba Corp Thin film forming apparatus
JPS62126362U (en) * 1986-11-04 1987-08-11
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components
WO1990010728A1 (en) * 1989-03-06 1990-09-20 Osaka Gas Company Limited Method of producing thin film
CN113213579A (en) * 2021-05-25 2021-08-06 贵州省材料产业技术研究院 Application of photocatalytic biochar composite material in catalytic degradation of printing and dyeing wastewater

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154101A (en) * 1984-12-27 1986-07-12 松下電器産業株式会社 Lead mounting of electronic component

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5773175A (en) * 1980-10-23 1982-05-07 Kobe Steel Ltd Chemical vapor deposition device
EP0095384A2 (en) * 1982-05-26 1983-11-30 Konica Corporation Vacuum deposition apparatus
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components
JPS61194809A (en) * 1985-02-25 1986-08-29 Toshiba Corp Thin film forming apparatus
JPS62126362U (en) * 1986-11-04 1987-08-11
JPH0111721Y2 (en) * 1986-11-04 1989-04-06
WO1990010728A1 (en) * 1989-03-06 1990-09-20 Osaka Gas Company Limited Method of producing thin film
CN113213579A (en) * 2021-05-25 2021-08-06 贵州省材料产业技术研究院 Application of photocatalytic biochar composite material in catalytic degradation of printing and dyeing wastewater

Also Published As

Publication number Publication date
JPS5538425B2 (en) 1980-10-03

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