JPS53144369A - Flatness inspecting apparatus - Google Patents
Flatness inspecting apparatusInfo
- Publication number
- JPS53144369A JPS53144369A JP5918977A JP5918977A JPS53144369A JP S53144369 A JPS53144369 A JP S53144369A JP 5918977 A JP5918977 A JP 5918977A JP 5918977 A JP5918977 A JP 5918977A JP S53144369 A JPS53144369 A JP S53144369A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- inspecting apparatus
- letting
- holding frame
- flatness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5918977A JPS53144369A (en) | 1977-05-21 | 1977-05-21 | Flatness inspecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5918977A JPS53144369A (en) | 1977-05-21 | 1977-05-21 | Flatness inspecting apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53144369A true JPS53144369A (en) | 1978-12-15 |
| JPS578405B2 JPS578405B2 (enrdf_load_stackoverflow) | 1982-02-16 |
Family
ID=13106205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5918977A Granted JPS53144369A (en) | 1977-05-21 | 1977-05-21 | Flatness inspecting apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53144369A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8659979B2 (en) | 2009-11-30 | 2014-02-25 | Casio Computer Co., Ltd | Inner frame and case unit |
-
1977
- 1977-05-21 JP JP5918977A patent/JPS53144369A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8659979B2 (en) | 2009-11-30 | 2014-02-25 | Casio Computer Co., Ltd | Inner frame and case unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS578405B2 (enrdf_load_stackoverflow) | 1982-02-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5433683A (en) | Air seal mounting for light emitting element | |
| JPS5330865A (en) | Electron microscope provided with sample irradiating electron beam quantity measuring unit | |
| DE2860935D1 (en) | Method for the non-destructive testing of semiconductor substrates | |
| JPS53144369A (en) | Flatness inspecting apparatus | |
| JPS5318967A (en) | Wafer sucking jig | |
| JPS5282412A (en) | Cleaning method for magnetic magnetic | |
| JPS52125269A (en) | Removing device for projecting defects from wafer | |
| JPS51138464A (en) | Device for detecting relative position of plural articles | |
| JPS5343553A (en) | Test piece size measuring apparatus | |
| JPS5439576A (en) | Inspection method for semiconductor device | |
| JPS543587A (en) | Inspecting apparatus | |
| JPS5389321A (en) | Preventing device for mis-selection | |
| JPS52156552A (en) | Wafer inspection apparatus | |
| JPS52149069A (en) | Method and device for detecting zone in which members constituting semiconductor are distributed | |
| JPS5332677A (en) | Electron beam exposure apparatus | |
| JPS57115843A (en) | Testing device for wafer | |
| JPS5216171A (en) | Mask fitting device | |
| JPS5224554A (en) | Surface inspection device | |
| JPS543295A (en) | Inspection for defect of bubble garnet | |
| JPS5247138A (en) | Inspector for electronic fuel injector | |
| JPS52104865A (en) | X-ray analysis apparatus in electronic microscope or like | |
| JPS5334535A (en) | Observation object supporting system | |
| JPS5347821A (en) | Microfish locator | |
| JPS5371A (en) | Scribing method of semiconductor wafer | |
| JPS5240075A (en) | Wafer prober |