JPS53144369A - Flatness inspecting apparatus - Google Patents

Flatness inspecting apparatus

Info

Publication number
JPS53144369A
JPS53144369A JP5918977A JP5918977A JPS53144369A JP S53144369 A JPS53144369 A JP S53144369A JP 5918977 A JP5918977 A JP 5918977A JP 5918977 A JP5918977 A JP 5918977A JP S53144369 A JPS53144369 A JP S53144369A
Authority
JP
Japan
Prior art keywords
specimen
inspecting apparatus
letting
holding frame
flatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5918977A
Other languages
English (en)
Japanese (ja)
Other versions
JPS578405B2 (OSRAM
Inventor
Hisanori Umitsuma
Haruo Hakamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP5918977A priority Critical patent/JPS53144369A/ja
Publication of JPS53144369A publication Critical patent/JPS53144369A/ja
Publication of JPS578405B2 publication Critical patent/JPS578405B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5918977A 1977-05-21 1977-05-21 Flatness inspecting apparatus Granted JPS53144369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5918977A JPS53144369A (en) 1977-05-21 1977-05-21 Flatness inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5918977A JPS53144369A (en) 1977-05-21 1977-05-21 Flatness inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS53144369A true JPS53144369A (en) 1978-12-15
JPS578405B2 JPS578405B2 (OSRAM) 1982-02-16

Family

ID=13106205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5918977A Granted JPS53144369A (en) 1977-05-21 1977-05-21 Flatness inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS53144369A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8659979B2 (en) 2009-11-30 2014-02-25 Casio Computer Co., Ltd Inner frame and case unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8659979B2 (en) 2009-11-30 2014-02-25 Casio Computer Co., Ltd Inner frame and case unit

Also Published As

Publication number Publication date
JPS578405B2 (OSRAM) 1982-02-16

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