JPS53142880A - Manufacture for semicondoctor device - Google Patents
Manufacture for semicondoctor deviceInfo
- Publication number
- JPS53142880A JPS53142880A JP5803477A JP5803477A JPS53142880A JP S53142880 A JPS53142880 A JP S53142880A JP 5803477 A JP5803477 A JP 5803477A JP 5803477 A JP5803477 A JP 5803477A JP S53142880 A JPS53142880 A JP S53142880A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- alignment
- accuracy
- semicondoctor
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To establish LSI with high density and high circuit integration, by increasing the alignment accuracy and the etching accuracy through the use of a high melting point metallic film and its oxide as a mask for the alignment of semiconductor region and a stopper for selective etching.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5803477A JPS53142880A (en) | 1977-05-18 | 1977-05-18 | Manufacture for semicondoctor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5803477A JPS53142880A (en) | 1977-05-18 | 1977-05-18 | Manufacture for semicondoctor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53142880A true JPS53142880A (en) | 1978-12-12 |
Family
ID=13072645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5803477A Pending JPS53142880A (en) | 1977-05-18 | 1977-05-18 | Manufacture for semicondoctor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53142880A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5882572A (en) * | 1981-11-10 | 1983-05-18 | Matsushita Electronics Corp | Manufacture of semiconductor device |
-
1977
- 1977-05-18 JP JP5803477A patent/JPS53142880A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5882572A (en) * | 1981-11-10 | 1983-05-18 | Matsushita Electronics Corp | Manufacture of semiconductor device |
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