JPS53142880A - Manufacture for semicondoctor device - Google Patents

Manufacture for semicondoctor device

Info

Publication number
JPS53142880A
JPS53142880A JP5803477A JP5803477A JPS53142880A JP S53142880 A JPS53142880 A JP S53142880A JP 5803477 A JP5803477 A JP 5803477A JP 5803477 A JP5803477 A JP 5803477A JP S53142880 A JPS53142880 A JP S53142880A
Authority
JP
Japan
Prior art keywords
manufacture
alignment
accuracy
semicondoctor
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5803477A
Other languages
Japanese (ja)
Inventor
Shigetoshi Takayanagi
Takashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5803477A priority Critical patent/JPS53142880A/en
Publication of JPS53142880A publication Critical patent/JPS53142880A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To establish LSI with high density and high circuit integration, by increasing the alignment accuracy and the etching accuracy through the use of a high melting point metallic film and its oxide as a mask for the alignment of semiconductor region and a stopper for selective etching.
COPYRIGHT: (C)1978,JPO&Japio
JP5803477A 1977-05-18 1977-05-18 Manufacture for semicondoctor device Pending JPS53142880A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5803477A JPS53142880A (en) 1977-05-18 1977-05-18 Manufacture for semicondoctor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5803477A JPS53142880A (en) 1977-05-18 1977-05-18 Manufacture for semicondoctor device

Publications (1)

Publication Number Publication Date
JPS53142880A true JPS53142880A (en) 1978-12-12

Family

ID=13072645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5803477A Pending JPS53142880A (en) 1977-05-18 1977-05-18 Manufacture for semicondoctor device

Country Status (1)

Country Link
JP (1) JPS53142880A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882572A (en) * 1981-11-10 1983-05-18 Matsushita Electronics Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5882572A (en) * 1981-11-10 1983-05-18 Matsushita Electronics Corp Manufacture of semiconductor device

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