JPS53142169A - Defect detector for semiconductor wafer surface - Google Patents
Defect detector for semiconductor wafer surfaceInfo
- Publication number
- JPS53142169A JPS53142169A JP5737977A JP5737977A JPS53142169A JP S53142169 A JPS53142169 A JP S53142169A JP 5737977 A JP5737977 A JP 5737977A JP 5737977 A JP5737977 A JP 5737977A JP S53142169 A JPS53142169 A JP S53142169A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer surface
- defect detector
- defect
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To secure an easy visible detection for the defect such as the stain or the dust on the substrate by forming a water film over the surface of the semiconductor substrate through spray of the steam.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5737977A JPS53142169A (en) | 1977-05-17 | 1977-05-17 | Defect detector for semiconductor wafer surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5737977A JPS53142169A (en) | 1977-05-17 | 1977-05-17 | Defect detector for semiconductor wafer surface |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53142169A true JPS53142169A (en) | 1978-12-11 |
Family
ID=13053954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5737977A Pending JPS53142169A (en) | 1977-05-17 | 1977-05-17 | Defect detector for semiconductor wafer surface |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53142169A (en) |
-
1977
- 1977-05-17 JP JP5737977A patent/JPS53142169A/en active Pending
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