JPS53142169A - Defect detector for semiconductor wafer surface - Google Patents

Defect detector for semiconductor wafer surface

Info

Publication number
JPS53142169A
JPS53142169A JP5737977A JP5737977A JPS53142169A JP S53142169 A JPS53142169 A JP S53142169A JP 5737977 A JP5737977 A JP 5737977A JP 5737977 A JP5737977 A JP 5737977A JP S53142169 A JPS53142169 A JP S53142169A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer surface
defect detector
defect
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5737977A
Other languages
Japanese (ja)
Inventor
Kenzo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5737977A priority Critical patent/JPS53142169A/en
Publication of JPS53142169A publication Critical patent/JPS53142169A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To secure an easy visible detection for the defect such as the stain or the dust on the substrate by forming a water film over the surface of the semiconductor substrate through spray of the steam.
COPYRIGHT: (C)1978,JPO&Japio
JP5737977A 1977-05-17 1977-05-17 Defect detector for semiconductor wafer surface Pending JPS53142169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5737977A JPS53142169A (en) 1977-05-17 1977-05-17 Defect detector for semiconductor wafer surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5737977A JPS53142169A (en) 1977-05-17 1977-05-17 Defect detector for semiconductor wafer surface

Publications (1)

Publication Number Publication Date
JPS53142169A true JPS53142169A (en) 1978-12-11

Family

ID=13053954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5737977A Pending JPS53142169A (en) 1977-05-17 1977-05-17 Defect detector for semiconductor wafer surface

Country Status (1)

Country Link
JP (1) JPS53142169A (en)

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