JPS53137680A - Manufacture for mos type semocunductot device - Google Patents

Manufacture for mos type semocunductot device

Info

Publication number
JPS53137680A
JPS53137680A JP5227377A JP5227377A JPS53137680A JP S53137680 A JPS53137680 A JP S53137680A JP 5227377 A JP5227377 A JP 5227377A JP 5227377 A JP5227377 A JP 5227377A JP S53137680 A JPS53137680 A JP S53137680A
Authority
JP
Japan
Prior art keywords
mos type
semocunductot
manufacture
channel length
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5227377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6110994B2 (enrdf_load_stackoverflow
Inventor
Michihiro Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5227377A priority Critical patent/JPS53137680A/ja
Publication of JPS53137680A publication Critical patent/JPS53137680A/ja
Publication of JPS6110994B2 publication Critical patent/JPS6110994B2/ja
Granted legal-status Critical Current

Links

JP5227377A 1977-05-07 1977-05-07 Manufacture for mos type semocunductot device Granted JPS53137680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5227377A JPS53137680A (en) 1977-05-07 1977-05-07 Manufacture for mos type semocunductot device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5227377A JPS53137680A (en) 1977-05-07 1977-05-07 Manufacture for mos type semocunductot device

Publications (2)

Publication Number Publication Date
JPS53137680A true JPS53137680A (en) 1978-12-01
JPS6110994B2 JPS6110994B2 (enrdf_load_stackoverflow) 1986-04-01

Family

ID=12910166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5227377A Granted JPS53137680A (en) 1977-05-07 1977-05-07 Manufacture for mos type semocunductot device

Country Status (1)

Country Link
JP (1) JPS53137680A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置

Also Published As

Publication number Publication date
JPS6110994B2 (enrdf_load_stackoverflow) 1986-04-01

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