JPS53129976A - Inspection method for characteristics of semiconductor elements in semiconductor wafers - Google Patents
Inspection method for characteristics of semiconductor elements in semiconductor wafersInfo
- Publication number
- JPS53129976A JPS53129976A JP4446777A JP4446777A JPS53129976A JP S53129976 A JPS53129976 A JP S53129976A JP 4446777 A JP4446777 A JP 4446777A JP 4446777 A JP4446777 A JP 4446777A JP S53129976 A JPS53129976 A JP S53129976A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- elements
- inspection method
- substrate
- semiconductor elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To secure a substrate to a reinforcing plate and avert its cracking by making use of the fact that if a multiplicity of elements are formed on one semiconductor substrate the partly devoid elements are produced on the circumferential edge part and that the characteristics inspection from the surfaces is feasible as the electrodes provided are in contact with the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4446777A JPS53129976A (en) | 1977-04-20 | 1977-04-20 | Inspection method for characteristics of semiconductor elements in semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4446777A JPS53129976A (en) | 1977-04-20 | 1977-04-20 | Inspection method for characteristics of semiconductor elements in semiconductor wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS53129976A true JPS53129976A (en) | 1978-11-13 |
Family
ID=12692295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4446777A Pending JPS53129976A (en) | 1977-04-20 | 1977-04-20 | Inspection method for characteristics of semiconductor elements in semiconductor wafers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53129976A (en) |
-
1977
- 1977-04-20 JP JP4446777A patent/JPS53129976A/en active Pending
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