JPS53113280A - Method of producing crystal - Google Patents

Method of producing crystal

Info

Publication number
JPS53113280A
JPS53113280A JP2906377A JP2906377A JPS53113280A JP S53113280 A JPS53113280 A JP S53113280A JP 2906377 A JP2906377 A JP 2906377A JP 2906377 A JP2906377 A JP 2906377A JP S53113280 A JPS53113280 A JP S53113280A
Authority
JP
Japan
Prior art keywords
producing crystal
crystals
oxidation
prone
beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2906377A
Other languages
Japanese (ja)
Other versions
JPS5812233B2 (en
Inventor
Hidejiro Miki
Toshio Murotani
Kazuaki Segawa
Takuji Shimanoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2906377A priority Critical patent/JPS5812233B2/en
Publication of JPS53113280A publication Critical patent/JPS53113280A/en
Publication of JPS5812233B2 publication Critical patent/JPS5812233B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To reduce oxidation rate of the constituent elements through getter action with beams of an element more prone to oxidation than an element of crystals to be formed, by emitting a dummy cell in forming crystals on a substrate employing molecular ray epitaxial growth.
COPYRIGHT: (C)1978,JPO&Japio
JP2906377A 1977-03-15 1977-03-15 Crystal manufacturing method Expired JPS5812233B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2906377A JPS5812233B2 (en) 1977-03-15 1977-03-15 Crystal manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2906377A JPS5812233B2 (en) 1977-03-15 1977-03-15 Crystal manufacturing method

Publications (2)

Publication Number Publication Date
JPS53113280A true JPS53113280A (en) 1978-10-03
JPS5812233B2 JPS5812233B2 (en) 1983-03-07

Family

ID=12265897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2906377A Expired JPS5812233B2 (en) 1977-03-15 1977-03-15 Crystal manufacturing method

Country Status (1)

Country Link
JP (1) JPS5812233B2 (en)

Also Published As

Publication number Publication date
JPS5812233B2 (en) 1983-03-07

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