JPS53113280A - Method of producing crystal - Google Patents
Method of producing crystalInfo
- Publication number
- JPS53113280A JPS53113280A JP2906377A JP2906377A JPS53113280A JP S53113280 A JPS53113280 A JP S53113280A JP 2906377 A JP2906377 A JP 2906377A JP 2906377 A JP2906377 A JP 2906377A JP S53113280 A JPS53113280 A JP S53113280A
- Authority
- JP
- Japan
- Prior art keywords
- producing crystal
- crystals
- oxidation
- prone
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE: To reduce oxidation rate of the constituent elements through getter action with beams of an element more prone to oxidation than an element of crystals to be formed, by emitting a dummy cell in forming crystals on a substrate employing molecular ray epitaxial growth.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2906377A JPS5812233B2 (en) | 1977-03-15 | 1977-03-15 | Crystal manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2906377A JPS5812233B2 (en) | 1977-03-15 | 1977-03-15 | Crystal manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53113280A true JPS53113280A (en) | 1978-10-03 |
JPS5812233B2 JPS5812233B2 (en) | 1983-03-07 |
Family
ID=12265897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2906377A Expired JPS5812233B2 (en) | 1977-03-15 | 1977-03-15 | Crystal manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5812233B2 (en) |
-
1977
- 1977-03-15 JP JP2906377A patent/JPS5812233B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5812233B2 (en) | 1983-03-07 |
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