JPS53105973A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53105973A JPS53105973A JP2021577A JP2021577A JPS53105973A JP S53105973 A JPS53105973 A JP S53105973A JP 2021577 A JP2021577 A JP 2021577A JP 2021577 A JP2021577 A JP 2021577A JP S53105973 A JPS53105973 A JP S53105973A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- laminating
- nitride
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To produce a stabilized protective film by laminating the high-molecule resin film through coating of the Si oxide or nitride on the substrate surface by the laser evaporation method or forming the layer in the opposite order to the above.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021577A JPS53105973A (en) | 1977-02-28 | 1977-02-28 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021577A JPS53105973A (en) | 1977-02-28 | 1977-02-28 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53105973A true JPS53105973A (en) | 1978-09-14 |
Family
ID=12020930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021577A Pending JPS53105973A (en) | 1977-02-28 | 1977-02-28 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53105973A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63264819A (en) * | 1987-04-22 | 1988-11-01 | Hitachi Ltd | Forming method for oxide superconductor thin film |
-
1977
- 1977-02-28 JP JP2021577A patent/JPS53105973A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63264819A (en) * | 1987-04-22 | 1988-11-01 | Hitachi Ltd | Forming method for oxide superconductor thin film |
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