JPS53105973A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53105973A
JPS53105973A JP2021577A JP2021577A JPS53105973A JP S53105973 A JPS53105973 A JP S53105973A JP 2021577 A JP2021577 A JP 2021577A JP 2021577 A JP2021577 A JP 2021577A JP S53105973 A JPS53105973 A JP S53105973A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
laminating
nitride
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021577A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Ueki
Takashi Nishida
Atsushi Saiki
Yukiyoshi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2021577A priority Critical patent/JPS53105973A/en
Publication of JPS53105973A publication Critical patent/JPS53105973A/en
Pending legal-status Critical Current

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  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To produce a stabilized protective film by laminating the high-molecule resin film through coating of the Si oxide or nitride on the substrate surface by the laser evaporation method or forming the layer in the opposite order to the above.
COPYRIGHT: (C)1978,JPO&Japio
JP2021577A 1977-02-28 1977-02-28 Manufacture of semiconductor device Pending JPS53105973A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021577A JPS53105973A (en) 1977-02-28 1977-02-28 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021577A JPS53105973A (en) 1977-02-28 1977-02-28 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53105973A true JPS53105973A (en) 1978-09-14

Family

ID=12020930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021577A Pending JPS53105973A (en) 1977-02-28 1977-02-28 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53105973A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63264819A (en) * 1987-04-22 1988-11-01 Hitachi Ltd Forming method for oxide superconductor thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63264819A (en) * 1987-04-22 1988-11-01 Hitachi Ltd Forming method for oxide superconductor thin film

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