JPS53136482A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS53136482A
JPS53136482A JP5072377A JP5072377A JPS53136482A JP S53136482 A JPS53136482 A JP S53136482A JP 5072377 A JP5072377 A JP 5072377A JP 5072377 A JP5072377 A JP 5072377A JP S53136482 A JPS53136482 A JP S53136482A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
wet
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5072377A
Other languages
Japanese (ja)
Inventor
Kazuya Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5072377A priority Critical patent/JPS53136482A/en
Publication of JPS53136482A publication Critical patent/JPS53136482A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To manufacture the device excellent in wet and corrosion proof, by coating a substrate having wiring layer with oxide film or nitride film and forming protective film on it.
COPYRIGHT: (C)1978,JPO&Japio
JP5072377A 1977-05-04 1977-05-04 Semiconductor device and its manufacture Pending JPS53136482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5072377A JPS53136482A (en) 1977-05-04 1977-05-04 Semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5072377A JPS53136482A (en) 1977-05-04 1977-05-04 Semiconductor device and its manufacture

Publications (1)

Publication Number Publication Date
JPS53136482A true JPS53136482A (en) 1978-11-29

Family

ID=12866782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5072377A Pending JPS53136482A (en) 1977-05-04 1977-05-04 Semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS53136482A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007250792A (en) * 2006-03-15 2007-09-27 Furukawa Electric Co Ltd:The Semiconductor element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007250792A (en) * 2006-03-15 2007-09-27 Furukawa Electric Co Ltd:The Semiconductor element

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