JPS53105385A - Manufacture for semiconductor - Google Patents

Manufacture for semiconductor

Info

Publication number
JPS53105385A
JPS53105385A JP1989577A JP1989577A JPS53105385A JP S53105385 A JPS53105385 A JP S53105385A JP 1989577 A JP1989577 A JP 1989577A JP 1989577 A JP1989577 A JP 1989577A JP S53105385 A JPS53105385 A JP S53105385A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
phosphorus
reliability
preventing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5642133B2 (enrdf_load_stackoverflow
Inventor
Katsuyuki Inayoshi
Masataka Shinguu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1989577A priority Critical patent/JPS53105385A/ja
Publication of JPS53105385A publication Critical patent/JPS53105385A/ja
Publication of JPS5642133B2 publication Critical patent/JPS5642133B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP1989577A 1977-02-25 1977-02-25 Manufacture for semiconductor Granted JPS53105385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989577A JPS53105385A (en) 1977-02-25 1977-02-25 Manufacture for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989577A JPS53105385A (en) 1977-02-25 1977-02-25 Manufacture for semiconductor

Publications (2)

Publication Number Publication Date
JPS53105385A true JPS53105385A (en) 1978-09-13
JPS5642133B2 JPS5642133B2 (enrdf_load_stackoverflow) 1981-10-02

Family

ID=12011924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989577A Granted JPS53105385A (en) 1977-02-25 1977-02-25 Manufacture for semiconductor

Country Status (1)

Country Link
JP (1) JPS53105385A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140130A (ja) * 1982-02-16 1983-08-19 Nec Corp 半導体装置の製造方法
JPS58192321A (ja) * 1982-05-06 1983-11-09 Nec Kyushu Ltd 半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161521U (enrdf_load_stackoverflow) * 1988-04-30 1989-11-09

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1974 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140130A (ja) * 1982-02-16 1983-08-19 Nec Corp 半導体装置の製造方法
JPS58192321A (ja) * 1982-05-06 1983-11-09 Nec Kyushu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5642133B2 (enrdf_load_stackoverflow) 1981-10-02

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