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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP1820277ApriorityCriticalpatent/JPS53104640A/en
Publication of JPS53104640ApublicationCriticalpatent/JPS53104640A/en
Manufacture Of Macromolecular Shaped Articles
(AREA)
Abstract
PURPOSE: To prevent the contamination of nozzle and the surface of a semiconductor chip with silver paste, by blasting gas from the nozzle of a vacuum chuck during the wetting stage of the chip with the paste.