JPS5296358A - Device for inspecting pattern - Google Patents

Device for inspecting pattern

Info

Publication number
JPS5296358A
JPS5296358A JP1200776A JP1200776A JPS5296358A JP S5296358 A JPS5296358 A JP S5296358A JP 1200776 A JP1200776 A JP 1200776A JP 1200776 A JP1200776 A JP 1200776A JP S5296358 A JPS5296358 A JP S5296358A
Authority
JP
Japan
Prior art keywords
inspecting pattern
inspecting
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1200776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5730227B2 (forum.php
Inventor
Tamaki Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP1200776A priority Critical patent/JPS5296358A/ja
Publication of JPS5296358A publication Critical patent/JPS5296358A/ja
Publication of JPS5730227B2 publication Critical patent/JPS5730227B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
JP1200776A 1976-02-06 1976-02-06 Device for inspecting pattern Granted JPS5296358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200776A JPS5296358A (en) 1976-02-06 1976-02-06 Device for inspecting pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200776A JPS5296358A (en) 1976-02-06 1976-02-06 Device for inspecting pattern

Publications (2)

Publication Number Publication Date
JPS5296358A true JPS5296358A (en) 1977-08-12
JPS5730227B2 JPS5730227B2 (forum.php) 1982-06-28

Family

ID=11793519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1200776A Granted JPS5296358A (en) 1976-02-06 1976-02-06 Device for inspecting pattern

Country Status (1)

Country Link
JP (1) JPS5296358A (forum.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310863A (en) * 1976-07-19 1978-01-31 Fujitsu Ltd Method of testing multilayer substrate
JP2008546991A (ja) * 2005-06-17 2008-12-25 アーテーゲー ルーテル ウント メルツァー ゲーエムベーハー フィンガーテスターを用いて、コンポーネント化されていない大型印刷回路基板を検査する方法
JP2013185978A (ja) * 2012-03-08 2013-09-19 Mitsubishi Electric Corp 長さ測定装置および長さ測定方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938968U (forum.php) * 1972-07-07 1974-04-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938968U (forum.php) * 1972-07-07 1974-04-05

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5310863A (en) * 1976-07-19 1978-01-31 Fujitsu Ltd Method of testing multilayer substrate
JP2008546991A (ja) * 2005-06-17 2008-12-25 アーテーゲー ルーテル ウント メルツァー ゲーエムベーハー フィンガーテスターを用いて、コンポーネント化されていない大型印刷回路基板を検査する方法
JP2013185978A (ja) * 2012-03-08 2013-09-19 Mitsubishi Electric Corp 長さ測定装置および長さ測定方法

Also Published As

Publication number Publication date
JPS5730227B2 (forum.php) 1982-06-28

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