JPS5293269A - Doping method for impurity in vapour deposited semiconductor - Google Patents
Doping method for impurity in vapour deposited semiconductorInfo
- Publication number
- JPS5293269A JPS5293269A JP928376A JP928376A JPS5293269A JP S5293269 A JPS5293269 A JP S5293269A JP 928376 A JP928376 A JP 928376A JP 928376 A JP928376 A JP 928376A JP S5293269 A JPS5293269 A JP S5293269A
- Authority
- JP
- Japan
- Prior art keywords
- impurity
- doping method
- deposited semiconductor
- vapour deposited
- vapour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Hall/Mr Elements (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE: To make it possible to add the impurity accurately and with a nice reproducibility by a doping method for the impurity in a vapour deposited semiconductor.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP928376A JPS5293269A (en) | 1976-02-02 | 1976-02-02 | Doping method for impurity in vapour deposited semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP928376A JPS5293269A (en) | 1976-02-02 | 1976-02-02 | Doping method for impurity in vapour deposited semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5293269A true JPS5293269A (en) | 1977-08-05 |
JPS5714021B2 JPS5714021B2 (en) | 1982-03-20 |
Family
ID=11716136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP928376A Granted JPS5293269A (en) | 1976-02-02 | 1976-02-02 | Doping method for impurity in vapour deposited semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5293269A (en) |
-
1976
- 1976-02-02 JP JP928376A patent/JPS5293269A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5714021B2 (en) | 1982-03-20 |
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