JPS5293269A - Doping method for impurity in vapour deposited semiconductor - Google Patents

Doping method for impurity in vapour deposited semiconductor

Info

Publication number
JPS5293269A
JPS5293269A JP928376A JP928376A JPS5293269A JP S5293269 A JPS5293269 A JP S5293269A JP 928376 A JP928376 A JP 928376A JP 928376 A JP928376 A JP 928376A JP S5293269 A JPS5293269 A JP S5293269A
Authority
JP
Japan
Prior art keywords
impurity
doping method
deposited semiconductor
vapour deposited
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP928376A
Other languages
Japanese (ja)
Other versions
JPS5714021B2 (en
Inventor
Hideaki Mizuno
Naoki Akiyama
Shinya Tominaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP928376A priority Critical patent/JPS5293269A/en
Publication of JPS5293269A publication Critical patent/JPS5293269A/en
Publication of JPS5714021B2 publication Critical patent/JPS5714021B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Hall/Mr Elements (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)

Abstract

PURPOSE: To make it possible to add the impurity accurately and with a nice reproducibility by a doping method for the impurity in a vapour deposited semiconductor.
COPYRIGHT: (C)1977,JPO&Japio
JP928376A 1976-02-02 1976-02-02 Doping method for impurity in vapour deposited semiconductor Granted JPS5293269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP928376A JPS5293269A (en) 1976-02-02 1976-02-02 Doping method for impurity in vapour deposited semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP928376A JPS5293269A (en) 1976-02-02 1976-02-02 Doping method for impurity in vapour deposited semiconductor

Publications (2)

Publication Number Publication Date
JPS5293269A true JPS5293269A (en) 1977-08-05
JPS5714021B2 JPS5714021B2 (en) 1982-03-20

Family

ID=11716136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP928376A Granted JPS5293269A (en) 1976-02-02 1976-02-02 Doping method for impurity in vapour deposited semiconductor

Country Status (1)

Country Link
JP (1) JPS5293269A (en)

Also Published As

Publication number Publication date
JPS5714021B2 (en) 1982-03-20

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