JPS5283175A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5283175A
JPS5283175A JP15844975A JP15844975A JPS5283175A JP S5283175 A JPS5283175 A JP S5283175A JP 15844975 A JP15844975 A JP 15844975A JP 15844975 A JP15844975 A JP 15844975A JP S5283175 A JPS5283175 A JP S5283175A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
defects
substrate
subitrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15844975A
Other languages
Japanese (ja)
Other versions
JPS59966B2 (en
Inventor
Tsutomu Akatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50158449A priority Critical patent/JPS59966B2/en
Publication of JPS5283175A publication Critical patent/JPS5283175A/en
Publication of JPS59966B2 publication Critical patent/JPS59966B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: Crystal defects such as slip lines, shallow pits, and thermal stacking faults are eliminated by using a back-lapped substrate whose rear surface is formed with a polycrystalline Si layer having defects as a substrate and heat treating said subitrate in an oxidative atmosphere including HCl thereby forming SiO2 film.
COPYRIGHT: (C)1977,JPO&Japio
JP50158449A 1975-12-31 1975-12-31 hand tai souchi no seizou houhou Expired JPS59966B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50158449A JPS59966B2 (en) 1975-12-31 1975-12-31 hand tai souchi no seizou houhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50158449A JPS59966B2 (en) 1975-12-31 1975-12-31 hand tai souchi no seizou houhou

Publications (2)

Publication Number Publication Date
JPS5283175A true JPS5283175A (en) 1977-07-11
JPS59966B2 JPS59966B2 (en) 1984-01-10

Family

ID=15671989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50158449A Expired JPS59966B2 (en) 1975-12-31 1975-12-31 hand tai souchi no seizou houhou

Country Status (1)

Country Link
JP (1) JPS59966B2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49100961A (en) * 1973-01-30 1974-09-24
JPS5028753A (en) * 1973-07-13 1975-03-24
JPS5051665A (en) * 1973-09-07 1975-05-08

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49100961A (en) * 1973-01-30 1974-09-24
JPS5028753A (en) * 1973-07-13 1975-03-24
JPS5051665A (en) * 1973-09-07 1975-05-08

Also Published As

Publication number Publication date
JPS59966B2 (en) 1984-01-10

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