JPS5283175A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5283175A JPS5283175A JP15844975A JP15844975A JPS5283175A JP S5283175 A JPS5283175 A JP S5283175A JP 15844975 A JP15844975 A JP 15844975A JP 15844975 A JP15844975 A JP 15844975A JP S5283175 A JPS5283175 A JP S5283175A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- defects
- substrate
- subitrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Bipolar Transistors (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: Crystal defects such as slip lines, shallow pits, and thermal stacking faults are eliminated by using a back-lapped substrate whose rear surface is formed with a polycrystalline Si layer having defects as a substrate and heat treating said subitrate in an oxidative atmosphere including HCl thereby forming SiO2 film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50158449A JPS59966B2 (en) | 1975-12-31 | 1975-12-31 | hand tai souchi no seizou houhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50158449A JPS59966B2 (en) | 1975-12-31 | 1975-12-31 | hand tai souchi no seizou houhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5283175A true JPS5283175A (en) | 1977-07-11 |
JPS59966B2 JPS59966B2 (en) | 1984-01-10 |
Family
ID=15671989
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50158449A Expired JPS59966B2 (en) | 1975-12-31 | 1975-12-31 | hand tai souchi no seizou houhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS59966B2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49100961A (en) * | 1973-01-30 | 1974-09-24 | ||
JPS5028753A (en) * | 1973-07-13 | 1975-03-24 | ||
JPS5051665A (en) * | 1973-09-07 | 1975-05-08 |
-
1975
- 1975-12-31 JP JP50158449A patent/JPS59966B2/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49100961A (en) * | 1973-01-30 | 1974-09-24 | ||
JPS5028753A (en) * | 1973-07-13 | 1975-03-24 | ||
JPS5051665A (en) * | 1973-09-07 | 1975-05-08 |
Also Published As
Publication number | Publication date |
---|---|
JPS59966B2 (en) | 1984-01-10 |
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