JPS5283072A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5283072A JPS5283072A JP15929575A JP15929575A JPS5283072A JP S5283072 A JPS5283072 A JP S5283072A JP 15929575 A JP15929575 A JP 15929575A JP 15929575 A JP15929575 A JP 15929575A JP S5283072 A JPS5283072 A JP S5283072A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- cahnnel
- mosfet
- sio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Local Oxidation Of Silicon (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15929575A JPS5283072A (en) | 1975-12-29 | 1975-12-29 | Production of semiconductor device |
| US05/754,261 US4085499A (en) | 1975-12-29 | 1976-12-27 | Method of making a MOS-type semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15929575A JPS5283072A (en) | 1975-12-29 | 1975-12-29 | Production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5283072A true JPS5283072A (en) | 1977-07-11 |
| JPS5755304B2 JPS5755304B2 (en:Method) | 1982-11-24 |
Family
ID=15690659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15929575A Granted JPS5283072A (en) | 1975-12-29 | 1975-12-29 | Production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5283072A (en:Method) |
-
1975
- 1975-12-29 JP JP15929575A patent/JPS5283072A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5755304B2 (en:Method) | 1982-11-24 |
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