JPS5282073A - Molecular beam epitaxial growth device - Google Patents

Molecular beam epitaxial growth device

Info

Publication number
JPS5282073A
JPS5282073A JP15913675A JP15913675A JPS5282073A JP S5282073 A JPS5282073 A JP S5282073A JP 15913675 A JP15913675 A JP 15913675A JP 15913675 A JP15913675 A JP 15913675A JP S5282073 A JPS5282073 A JP S5282073A
Authority
JP
Japan
Prior art keywords
epitaxial growth
molecular beam
beam epitaxial
growth device
voluminously
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15913675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5528216B2 (enExample
Inventor
Toshio Fujii
Sukehisa Hiyamizu
Seihei Maekawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15913675A priority Critical patent/JPS5282073A/ja
Publication of JPS5282073A publication Critical patent/JPS5282073A/ja
Publication of JPS5528216B2 publication Critical patent/JPS5528216B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP15913675A 1975-12-27 1975-12-27 Molecular beam epitaxial growth device Granted JPS5282073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15913675A JPS5282073A (en) 1975-12-27 1975-12-27 Molecular beam epitaxial growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15913675A JPS5282073A (en) 1975-12-27 1975-12-27 Molecular beam epitaxial growth device

Publications (2)

Publication Number Publication Date
JPS5282073A true JPS5282073A (en) 1977-07-08
JPS5528216B2 JPS5528216B2 (enExample) 1980-07-26

Family

ID=15687023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15913675A Granted JPS5282073A (en) 1975-12-27 1975-12-27 Molecular beam epitaxial growth device

Country Status (1)

Country Link
JP (1) JPS5282073A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6282580A (ja) * 1985-10-06 1987-04-16 Yoshiro Nakamatsu ヘツド対応体容器用ラベル

Also Published As

Publication number Publication date
JPS5528216B2 (enExample) 1980-07-26

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