JPS53119282A - Manufacturing apparatus for semiconductor crystal - Google Patents

Manufacturing apparatus for semiconductor crystal

Info

Publication number
JPS53119282A
JPS53119282A JP3338277A JP3338277A JPS53119282A JP S53119282 A JPS53119282 A JP S53119282A JP 3338277 A JP3338277 A JP 3338277A JP 3338277 A JP3338277 A JP 3338277A JP S53119282 A JPS53119282 A JP S53119282A
Authority
JP
Japan
Prior art keywords
manufacturing apparatus
semiconductor crystal
crystal
heatsheltering
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3338277A
Other languages
Japanese (ja)
Inventor
Satoyoshi Kuroda
Koji Kozuka
Masatoshi Matsuda
Michiyoshi Maki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3338277A priority Critical patent/JPS53119282A/en
Publication of JPS53119282A publication Critical patent/JPS53119282A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To make broad and thin plate crystal without being cut or ground by installing a lid having a hole, through which crystal is taken out, on a heatsheltering means surrounding heaters.
COPYRIGHT: (C)1978,JPO&Japio
JP3338277A 1977-03-28 1977-03-28 Manufacturing apparatus for semiconductor crystal Pending JPS53119282A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3338277A JPS53119282A (en) 1977-03-28 1977-03-28 Manufacturing apparatus for semiconductor crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3338277A JPS53119282A (en) 1977-03-28 1977-03-28 Manufacturing apparatus for semiconductor crystal

Publications (1)

Publication Number Publication Date
JPS53119282A true JPS53119282A (en) 1978-10-18

Family

ID=12385032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3338277A Pending JPS53119282A (en) 1977-03-28 1977-03-28 Manufacturing apparatus for semiconductor crystal

Country Status (1)

Country Link
JP (1) JPS53119282A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6060349B1 (en) * 2016-02-25 2017-01-18 並木精密宝石株式会社 Sapphire single crystal member manufacturing apparatus and sapphire single crystal member manufacturing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6060349B1 (en) * 2016-02-25 2017-01-18 並木精密宝石株式会社 Sapphire single crystal member manufacturing apparatus and sapphire single crystal member manufacturing method

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