JPS5280781A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5280781A
JPS5280781A JP50156845A JP15684575A JPS5280781A JP S5280781 A JPS5280781 A JP S5280781A JP 50156845 A JP50156845 A JP 50156845A JP 15684575 A JP15684575 A JP 15684575A JP S5280781 A JPS5280781 A JP S5280781A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
photolithography
sio
proximity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50156845A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5633866B2 (enrdf_load_stackoverflow
Inventor
Shigeharu Abe
Hideo Tamura
Kenji Sugishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50156845A priority Critical patent/JPS5280781A/ja
Publication of JPS5280781A publication Critical patent/JPS5280781A/ja
Publication of JPS5633866B2 publication Critical patent/JPS5633866B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
JP50156845A 1975-12-27 1975-12-27 Production of semiconductor device Granted JPS5280781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50156845A JPS5280781A (en) 1975-12-27 1975-12-27 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50156845A JPS5280781A (en) 1975-12-27 1975-12-27 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5280781A true JPS5280781A (en) 1977-07-06
JPS5633866B2 JPS5633866B2 (enrdf_load_stackoverflow) 1981-08-06

Family

ID=15636619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50156845A Granted JPS5280781A (en) 1975-12-27 1975-12-27 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5280781A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583246A (ja) * 1981-06-29 1983-01-10 Fujitsu Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583246A (ja) * 1981-06-29 1983-01-10 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5633866B2 (enrdf_load_stackoverflow) 1981-08-06

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