JPS5279666A - Production of transistor - Google Patents

Production of transistor

Info

Publication number
JPS5279666A
JPS5279666A JP50159363A JP15936375A JPS5279666A JP S5279666 A JPS5279666 A JP S5279666A JP 50159363 A JP50159363 A JP 50159363A JP 15936375 A JP15936375 A JP 15936375A JP S5279666 A JPS5279666 A JP S5279666A
Authority
JP
Japan
Prior art keywords
transistor
production
coating
phosphorus
uniformity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50159363A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5530304B2 (enrdf_load_html_response
Inventor
Hideaki Matsubara
Koki Kato
Akio Saito
Yoshikazu Tsuchiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP50159363A priority Critical patent/JPS5279666A/ja
Publication of JPS5279666A publication Critical patent/JPS5279666A/ja
Publication of JPS5530304B2 publication Critical patent/JPS5530304B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D44/00—Charge transfer devices
    • H10D44/40—Charge-coupled devices [CCD]
    • H10D44/45—Charge-coupled devices [CCD] having field effect produced by insulated gate electrodes 

Landscapes

  • Bipolar Transistors (AREA)
JP50159363A 1975-12-25 1975-12-25 Production of transistor Granted JPS5279666A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50159363A JPS5279666A (en) 1975-12-25 1975-12-25 Production of transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50159363A JPS5279666A (en) 1975-12-25 1975-12-25 Production of transistor

Publications (2)

Publication Number Publication Date
JPS5279666A true JPS5279666A (en) 1977-07-04
JPS5530304B2 JPS5530304B2 (enrdf_load_html_response) 1980-08-09

Family

ID=15692195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50159363A Granted JPS5279666A (en) 1975-12-25 1975-12-25 Production of transistor

Country Status (1)

Country Link
JP (1) JPS5279666A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635464A (en) * 1979-08-30 1981-04-08 Toshiba Corp Formation of npn type transistor
JPS58168221A (ja) * 1982-03-29 1983-10-04 Toshiba Corp 半導体装置の製造方法
JP2002075892A (ja) * 2000-08-28 2002-03-15 Sanken Electric Co Ltd 液状不純物源材料及びこれを使用した半導体装置の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890473A (enrdf_load_html_response) * 1972-02-14 1973-11-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890473A (enrdf_load_html_response) * 1972-02-14 1973-11-26

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635464A (en) * 1979-08-30 1981-04-08 Toshiba Corp Formation of npn type transistor
JPS58168221A (ja) * 1982-03-29 1983-10-04 Toshiba Corp 半導体装置の製造方法
JP2002075892A (ja) * 2000-08-28 2002-03-15 Sanken Electric Co Ltd 液状不純物源材料及びこれを使用した半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5530304B2 (enrdf_load_html_response) 1980-08-09

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