JPS5245277A - Method for production of complementary mis-ic - Google Patents

Method for production of complementary mis-ic

Info

Publication number
JPS5245277A
JPS5245277A JP50120683A JP12068375A JPS5245277A JP S5245277 A JPS5245277 A JP S5245277A JP 50120683 A JP50120683 A JP 50120683A JP 12068375 A JP12068375 A JP 12068375A JP S5245277 A JPS5245277 A JP S5245277A
Authority
JP
Japan
Prior art keywords
production
complementary mis
mis
complementary
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50120683A
Other languages
Japanese (ja)
Inventor
Hirohito Kawagoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50120683A priority Critical patent/JPS5245277A/en
Publication of JPS5245277A publication Critical patent/JPS5245277A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS

Abstract

PURPOSE:On the production of the complementary MIS-IC, the mask process for the diffusion of source and drain is made to be once.
JP50120683A 1975-10-08 1975-10-08 Method for production of complementary mis-ic Pending JPS5245277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50120683A JPS5245277A (en) 1975-10-08 1975-10-08 Method for production of complementary mis-ic

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50120683A JPS5245277A (en) 1975-10-08 1975-10-08 Method for production of complementary mis-ic

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP57176170A Division JPS5874070A (en) 1982-10-08 1982-10-08 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5245277A true JPS5245277A (en) 1977-04-09

Family

ID=14792353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50120683A Pending JPS5245277A (en) 1975-10-08 1975-10-08 Method for production of complementary mis-ic

Country Status (1)

Country Link
JP (1) JPS5245277A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59173635U (en) * 1983-05-04 1984-11-20 北海製罐株式会社 paper feeder
JPS59210660A (en) * 1983-02-23 1984-11-29 テキサス・インスツルメンツ・インコ−ポレイテツド Method of producing cmos device
JPS60117330U (en) * 1984-01-13 1985-08-08 株式会社　石津製作所 Goods conveyance device
JPS6164625A (en) * 1984-09-03 1986-04-03 エービー　テトラパック Method and device for stacking article
JPS61181155A (en) * 1984-11-29 1986-08-13 テキサス　インスツルメンツ　インコーポレイテッド Making high integration cmos ic
JPH02151064A (en) * 1988-12-01 1990-06-11 Toshiba Corp Manufacture of semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210660A (en) * 1983-02-23 1984-11-29 テキサス・インスツルメンツ・インコ−ポレイテツド Method of producing cmos device
JPS59173635U (en) * 1983-05-04 1984-11-20 北海製罐株式会社 paper feeder
JPS60117330U (en) * 1984-01-13 1985-08-08 株式会社　石津製作所 Goods conveyance device
JPS6164625A (en) * 1984-09-03 1986-04-03 エービー　テトラパック Method and device for stacking article
JPS61181155A (en) * 1984-11-29 1986-08-13 テキサス　インスツルメンツ　インコーポレイテッド Making high integration cmos ic
JPH02151064A (en) * 1988-12-01 1990-06-11 Toshiba Corp Manufacture of semiconductor device

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