JPS5275988A - Production of semiconductor memory device - Google Patents

Production of semiconductor memory device

Info

Publication number
JPS5275988A
JPS5275988A JP50152985A JP15298575A JPS5275988A JP S5275988 A JPS5275988 A JP S5275988A JP 50152985 A JP50152985 A JP 50152985A JP 15298575 A JP15298575 A JP 15298575A JP S5275988 A JPS5275988 A JP S5275988A
Authority
JP
Japan
Prior art keywords
memory device
production
semiconductor memory
film
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50152985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS561787B2 (enExample
Inventor
Takashi Ito
Hidetoshi Nishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50152985A priority Critical patent/JPS5275988A/ja
Publication of JPS5275988A publication Critical patent/JPS5275988A/ja
Publication of JPS561787B2 publication Critical patent/JPS561787B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/68—Floating-gate IGFETs
    • H10D30/681—Floating-gate IGFETs having only two programming levels

Landscapes

  • Non-Volatile Memory (AREA)
JP50152985A 1975-12-22 1975-12-22 Production of semiconductor memory device Granted JPS5275988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50152985A JPS5275988A (en) 1975-12-22 1975-12-22 Production of semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50152985A JPS5275988A (en) 1975-12-22 1975-12-22 Production of semiconductor memory device

Publications (2)

Publication Number Publication Date
JPS5275988A true JPS5275988A (en) 1977-06-25
JPS561787B2 JPS561787B2 (enExample) 1981-01-16

Family

ID=15552434

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50152985A Granted JPS5275988A (en) 1975-12-22 1975-12-22 Production of semiconductor memory device

Country Status (1)

Country Link
JP (1) JPS5275988A (enExample)

Also Published As

Publication number Publication date
JPS561787B2 (enExample) 1981-01-16

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