JPS5272184A - Productuion of mos type transistor - Google Patents

Productuion of mos type transistor

Info

Publication number
JPS5272184A
JPS5272184A JP14870875A JP14870875A JPS5272184A JP S5272184 A JPS5272184 A JP S5272184A JP 14870875 A JP14870875 A JP 14870875A JP 14870875 A JP14870875 A JP 14870875A JP S5272184 A JPS5272184 A JP S5272184A
Authority
JP
Japan
Prior art keywords
productuion
type transistor
mos type
occurence
plasmas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14870875A
Other languages
Japanese (ja)
Inventor
Kiyohiro Kawasaki
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14870875A priority Critical patent/JPS5272184A/en
Publication of JPS5272184A publication Critical patent/JPS5272184A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prevent the occurence of abnormal leak current and achieve the higher density of elements by etching a single crystal Si film by hydrofluoric acid, nitric acid or plasmas to form an Si island of a rectangular parallelopiped.
COPYRIGHT: (C)1977,JPO&Japio
JP14870875A 1975-12-12 1975-12-12 Productuion of mos type transistor Pending JPS5272184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14870875A JPS5272184A (en) 1975-12-12 1975-12-12 Productuion of mos type transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14870875A JPS5272184A (en) 1975-12-12 1975-12-12 Productuion of mos type transistor

Publications (1)

Publication Number Publication Date
JPS5272184A true JPS5272184A (en) 1977-06-16

Family

ID=15458812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14870875A Pending JPS5272184A (en) 1975-12-12 1975-12-12 Productuion of mos type transistor

Country Status (1)

Country Link
JP (1) JPS5272184A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973983A (en) * 1972-09-29 1974-07-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973983A (en) * 1972-09-29 1974-07-17

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