JPS5272184A - Productuion of mos type transistor - Google Patents
Productuion of mos type transistorInfo
- Publication number
- JPS5272184A JPS5272184A JP14870875A JP14870875A JPS5272184A JP S5272184 A JPS5272184 A JP S5272184A JP 14870875 A JP14870875 A JP 14870875A JP 14870875 A JP14870875 A JP 14870875A JP S5272184 A JPS5272184 A JP S5272184A
- Authority
- JP
- Japan
- Prior art keywords
- productuion
- type transistor
- mos type
- occurence
- plasmas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To prevent the occurence of abnormal leak current and achieve the higher density of elements by etching a single crystal Si film by hydrofluoric acid, nitric acid or plasmas to form an Si island of a rectangular parallelopiped.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14870875A JPS5272184A (en) | 1975-12-12 | 1975-12-12 | Productuion of mos type transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14870875A JPS5272184A (en) | 1975-12-12 | 1975-12-12 | Productuion of mos type transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5272184A true JPS5272184A (en) | 1977-06-16 |
Family
ID=15458812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14870875A Pending JPS5272184A (en) | 1975-12-12 | 1975-12-12 | Productuion of mos type transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5272184A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4973983A (en) * | 1972-09-29 | 1974-07-17 |
-
1975
- 1975-12-12 JP JP14870875A patent/JPS5272184A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4973983A (en) * | 1972-09-29 | 1974-07-17 |
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