JPS5269560A - Electronic line irradiation epitaxial method - Google Patents

Electronic line irradiation epitaxial method

Info

Publication number
JPS5269560A
JPS5269560A JP14604875A JP14604875A JPS5269560A JP S5269560 A JPS5269560 A JP S5269560A JP 14604875 A JP14604875 A JP 14604875A JP 14604875 A JP14604875 A JP 14604875A JP S5269560 A JPS5269560 A JP S5269560A
Authority
JP
Japan
Prior art keywords
electronic line
epitaxial method
line irradiation
line
molecule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14604875A
Other languages
English (en)
Inventor
Toshio Murotani
Takuji Shimanoe
Junjiro Kai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14604875A priority Critical patent/JPS5269560A/ja
Publication of JPS5269560A publication Critical patent/JPS5269560A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP14604875A 1975-12-08 1975-12-08 Electronic line irradiation epitaxial method Pending JPS5269560A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14604875A JPS5269560A (en) 1975-12-08 1975-12-08 Electronic line irradiation epitaxial method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14604875A JPS5269560A (en) 1975-12-08 1975-12-08 Electronic line irradiation epitaxial method

Publications (1)

Publication Number Publication Date
JPS5269560A true JPS5269560A (en) 1977-06-09

Family

ID=15398912

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14604875A Pending JPS5269560A (en) 1975-12-08 1975-12-08 Electronic line irradiation epitaxial method

Country Status (1)

Country Link
JP (1) JPS5269560A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02262330A (ja) * 1989-04-03 1990-10-25 Touyoko Kagaku Kk Ｓｉ選択エピタキシャル成長方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151064A (ja) * 1974-05-23 1975-12-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151064A (ja) * 1974-05-23 1975-12-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02262330A (ja) * 1989-04-03 1990-10-25 Touyoko Kagaku Kk Ｓｉ選択エピタキシャル成長方法

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