JPS5267979A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS5267979A
JPS5267979A JP50144726A JP14472675A JPS5267979A JP S5267979 A JPS5267979 A JP S5267979A JP 50144726 A JP50144726 A JP 50144726A JP 14472675 A JP14472675 A JP 14472675A JP S5267979 A JPS5267979 A JP S5267979A
Authority
JP
Japan
Prior art keywords
semiconductor
manufacture
hfe
enhance
ion injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50144726A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5634103B2 (enExample
Inventor
Kazushi Nagata
Hisao Yakushiji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50144726A priority Critical patent/JPS5267979A/ja
Publication of JPS5267979A publication Critical patent/JPS5267979A/ja
Publication of JPS5634103B2 publication Critical patent/JPS5634103B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP50144726A 1975-12-04 1975-12-04 Manufacture of semiconductor Granted JPS5267979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50144726A JPS5267979A (en) 1975-12-04 1975-12-04 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50144726A JPS5267979A (en) 1975-12-04 1975-12-04 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
JPS5267979A true JPS5267979A (en) 1977-06-06
JPS5634103B2 JPS5634103B2 (enExample) 1981-08-07

Family

ID=15368881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50144726A Granted JPS5267979A (en) 1975-12-04 1975-12-04 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS5267979A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123780A (enExample) * 1973-03-31 1974-11-27 Mitsubishi Electric Corp
JPS5022582A (enExample) * 1973-05-25 1975-03-11

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123780A (enExample) * 1973-03-31 1974-11-27 Mitsubishi Electric Corp
JPS5022582A (enExample) * 1973-05-25 1975-03-11

Also Published As

Publication number Publication date
JPS5634103B2 (enExample) 1981-08-07

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