JPS5267274A - Semiconductor wafer transfer equipment - Google Patents

Semiconductor wafer transfer equipment

Info

Publication number
JPS5267274A
JPS5267274A JP14350875A JP14350875A JPS5267274A JP S5267274 A JPS5267274 A JP S5267274A JP 14350875 A JP14350875 A JP 14350875A JP 14350875 A JP14350875 A JP 14350875A JP S5267274 A JPS5267274 A JP S5267274A
Authority
JP
Japan
Prior art keywords
transfer equipment
semiconductor wafer
wafer transfer
vacuum suction
switching part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14350875A
Other languages
English (en)
Inventor
Tsugumitsu Miyasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP14350875A priority Critical patent/JPS5267274A/ja
Publication of JPS5267274A publication Critical patent/JPS5267274A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP14350875A 1975-12-01 1975-12-01 Semiconductor wafer transfer equipment Pending JPS5267274A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14350875A JPS5267274A (en) 1975-12-01 1975-12-01 Semiconductor wafer transfer equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14350875A JPS5267274A (en) 1975-12-01 1975-12-01 Semiconductor wafer transfer equipment

Publications (1)

Publication Number Publication Date
JPS5267274A true JPS5267274A (en) 1977-06-03

Family

ID=15340350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14350875A Pending JPS5267274A (en) 1975-12-01 1975-12-01 Semiconductor wafer transfer equipment

Country Status (1)

Country Link
JP (1) JPS5267274A (ja)

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