JPS5265690A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5265690A
JPS5265690A JP14271575A JP14271575A JPS5265690A JP S5265690 A JPS5265690 A JP S5265690A JP 14271575 A JP14271575 A JP 14271575A JP 14271575 A JP14271575 A JP 14271575A JP S5265690 A JPS5265690 A JP S5265690A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
insulating film
wiring conductor
serrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14271575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5733858B2 (cs
Inventor
Tsuneo Matsumura
Minoru Shioda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP14271575A priority Critical patent/JPS5265690A/ja
Publication of JPS5265690A publication Critical patent/JPS5265690A/ja
Publication of JPS5733858B2 publication Critical patent/JPS5733858B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP14271575A 1975-11-26 1975-11-26 Production of semiconductor device Granted JPS5265690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14271575A JPS5265690A (en) 1975-11-26 1975-11-26 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14271575A JPS5265690A (en) 1975-11-26 1975-11-26 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5265690A true JPS5265690A (en) 1977-05-31
JPS5733858B2 JPS5733858B2 (cs) 1982-07-20

Family

ID=15321881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14271575A Granted JPS5265690A (en) 1975-11-26 1975-11-26 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5265690A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112027A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57112027A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS5733858B2 (cs) 1982-07-20

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